Effects of surface terminal bonds and microstructure of SiO2 aerogel films on dry etching

Seok Joo Wang, Hyung Ho Park, Geun Young Yeom, Sang Hoon Hyun

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effects of surface terminal bonds and microstructure of SiO<sub>2</sub> aerogel films on dry etching'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds