Effects of the wet air on the properties of the lanthanum oxide and lanthanum aluminate thin films

Jin Hyung Jun, Doo Jin Choi

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Lanthanum oxide and lanthanum aluminate thin films were deposited on Si substrates. The as-grown films were stored in wet ambient and dry ambient for days and annealed after storage and also the structural and the electrical properties of the films were investigated. As the storage time increased, the La2O3 films stored in wet ambient showed rapid reaction with moisture and the properties degraded. In case of the LAO films, although the thickness of the film also increased during hydration, the properties of the film did not so much changed due to the role of the incorporated aluminum. The LAO films showed better hydration resistance characteristics and so more suitable for conventional wet cleaning process in semiconductor fabrication.

Original languageEnglish
Pages (from-to)205-208
Number of pages4
JournalThin Solid Films
Volume504
Issue number1-2
DOIs
Publication statusPublished - 2006 May 10

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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