Effects of thermal noise on dynamic stress sensing of nanoelectromechanical resonators

S. C. Jun, W. K. Kim, Y. M. Jung, X. M.H. Huang

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Nanoelectromechanical resonators are promising high-sensitivity sensors for force, charge and mass detection. Presented is a dynamic stress-sensing technique using nano-scale suspended beams. Using magnetomotive transduction, the effective dynamic stress was measured on the beam from the resonance frequency at room temperature under a moderate vacuum. The sensitivity of the nano-scale resonator varied less than 1, while its signal-to-noise ratio was reduced by about 30 in a W electrothermal power range.

Original languageEnglish
Pages (from-to)412-414
Number of pages3
JournalElectronics Letters
Volume45
Issue number8
DOIs
Publication statusPublished - 2009 Apr 20

Fingerprint

Thermal noise
Resonators
Signal to noise ratio
Vacuum
Sensors
Temperature

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Jun, S. C. ; Kim, W. K. ; Jung, Y. M. ; Huang, X. M.H. / Effects of thermal noise on dynamic stress sensing of nanoelectromechanical resonators. In: Electronics Letters. 2009 ; Vol. 45, No. 8. pp. 412-414.
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Effects of thermal noise on dynamic stress sensing of nanoelectromechanical resonators. / Jun, S. C.; Kim, W. K.; Jung, Y. M.; Huang, X. M.H.

In: Electronics Letters, Vol. 45, No. 8, 20.04.2009, p. 412-414.

Research output: Contribution to journalArticle

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