Effects of thermal noise on dynamic stress sensing of nanoelectromechanical resonators

S. C. Jun, W. K. Kim, Y. M. Jung, X. M.H. Huang

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Nanoelectromechanical resonators are promising high-sensitivity sensors for force, charge and mass detection. Presented is a dynamic stress-sensing technique using nano-scale suspended beams. Using magnetomotive transduction, the effective dynamic stress was measured on the beam from the resonance frequency at room temperature under a moderate vacuum. The sensitivity of the nano-scale resonator varied less than 1, while its signal-to-noise ratio was reduced by about 30 in a W electrothermal power range.

Original languageEnglish
Pages (from-to)412-414
Number of pages3
JournalElectronics Letters
Volume45
Issue number8
DOIs
Publication statusPublished - 2009

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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