Effects of thermally induced anatase-to-rutile phase transition in MOCVD-grown TiO₂ films on structural and optical properties

Engineering & Materials Science

• Metallorganic chemical vapor deposition 100%
• Titanium dioxide 82%
• Optical properties 78%
• Structural properties 68%
• Phase transitions 65%
• Annealing 23%
• Optical band gaps 15%
• Electron spectroscopy 13%
• Temperature 12%
• Diffraction patterns 11%
• Refractive index 10%
• Atomic force microscopy 10%
• X ray photoelectron spectroscopy 9%
• Surface structure 9%
• Quartz 8%
• X ray diffraction 7%
• Glass 6%
• Scanning 6%
• Microstructure 5%

Chemistry

• Optical Property 46%
• Liquid Film 30%
• Rutile 15%
• Titanium Dioxide 13%
• Annealing 12%
• Electron Spectroscopy 10%
• Surface Composition 8%
• Transmittance 7%
• Refractive Index 7%
• Chemical Vapour Deposition 7%
• Quartz 7%
• Atomic Force Microscopy 6%
• Band Gap 5%
• X-Ray Photoelectron Spectroscopy 5%
• Glass 5%
• Microstructure 5%