Abstract
A series of ZnO films with various thicknesses were prepared on (0001) sapphire substrate by pulsed laser deposition (PLD). Scanning electron microscopy (SEM) and x-ray diffraction (XRD) analysis were utilized to investigate the effects of thickness variation on the surface morphology and the crystallinity. The electrical and optical properties of the films were also investigated as a function of the film thickness. It was found that the crystalline quality, electrical and optical properties of the films depended on the film thickness and were improved with increasing the film thickness. This is attributed to the fact that the films thinner than 4000 Å are under the severe misfit strain, which decreases with increasing the film thickness further.
| Original language | English |
|---|---|
| Pages (from-to) | 28-31 |
| Number of pages | 4 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 41 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2002 Jan 1 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy(all)
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Effects of thickness variation on properties of ZnO thin films grown by pulsed laser deposition. / Myoung, Jae Min; Yoon, Wook Hi; Lee, Dong Hi; Yun, Ilgu; Bae, Sang Hyuck; Lee, Sang Yeol.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 41, No. 1, 01.01.2002, p. 28-31.Research output: Contribution to journal › Article
TY - JOUR
T1 - Effects of thickness variation on properties of ZnO thin films grown by pulsed laser deposition
AU - Myoung, Jae Min
AU - Yoon, Wook Hi
AU - Lee, Dong Hi
AU - Yun, Ilgu
AU - Bae, Sang Hyuck
AU - Lee, Sang Yeol
PY - 2002/1/1
Y1 - 2002/1/1
N2 - A series of ZnO films with various thicknesses were prepared on (0001) sapphire substrate by pulsed laser deposition (PLD). Scanning electron microscopy (SEM) and x-ray diffraction (XRD) analysis were utilized to investigate the effects of thickness variation on the surface morphology and the crystallinity. The electrical and optical properties of the films were also investigated as a function of the film thickness. It was found that the crystalline quality, electrical and optical properties of the films depended on the film thickness and were improved with increasing the film thickness. This is attributed to the fact that the films thinner than 4000 Å are under the severe misfit strain, which decreases with increasing the film thickness further.
AB - A series of ZnO films with various thicknesses were prepared on (0001) sapphire substrate by pulsed laser deposition (PLD). Scanning electron microscopy (SEM) and x-ray diffraction (XRD) analysis were utilized to investigate the effects of thickness variation on the surface morphology and the crystallinity. The electrical and optical properties of the films were also investigated as a function of the film thickness. It was found that the crystalline quality, electrical and optical properties of the films depended on the film thickness and were improved with increasing the film thickness. This is attributed to the fact that the films thinner than 4000 Å are under the severe misfit strain, which decreases with increasing the film thickness further.
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UR - http://www.scopus.com/inward/citedby.url?scp=0036301267&partnerID=8YFLogxK
U2 - 10.1143/JJAP.41.28
DO - 10.1143/JJAP.41.28
M3 - Article
VL - 41
SP - 28
EP - 31
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 1
ER -