Effects of thickness variation on properties of ZnO thin films grown by pulsed laser deposition

Jae Min Myoung; Wook Hi Yoon; Dong Hi Lee; Ilgu Yun; Sang Hyuck Bae; Sang Yeol Lee

doi:10.1143/JJAP.41.28

Effects of thickness variation on properties of ZnO thin films grown by pulsed laser deposition

Jae Min Myoung, Wook Hi Yoon, Dong Hi Lee, Ilgu Yun, Sang Hyuck Bae, Sang Yeol Lee

Research output: Contribution to journal › Article

128 Citations (Scopus)

Abstract

A series of ZnO films with various thicknesses were prepared on (0001) sapphire substrate by pulsed laser deposition (PLD). Scanning electron microscopy (SEM) and x-ray diffraction (XRD) analysis were utilized to investigate the effects of thickness variation on the surface morphology and the crystallinity. The electrical and optical properties of the films were also investigated as a function of the film thickness. It was found that the crystalline quality, electrical and optical properties of the films depended on the film thickness and were improved with increasing the film thickness. This is attributed to the fact that the films thinner than 4000 Å are under the severe misfit strain, which decreases with increasing the film thickness further.

Original language	English
Pages (from-to)	28-31
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	41
Issue number	1
DOIs	https://doi.org/10.1143/JJAP.41.28
Publication status	Published - 2002 Jan 1

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

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Myoung, J. M., Yoon, W. H., Lee, D. H., Yun, I., Bae, S. H., & Lee, S. Y. (2002). Effects of thickness variation on properties of ZnO thin films grown by pulsed laser deposition. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 41(1), 28-31. https://doi.org/10.1143/JJAP.41.28

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abstract = "A series of ZnO films with various thicknesses were prepared on (0001) sapphire substrate by pulsed laser deposition (PLD). Scanning electron microscopy (SEM) and x-ray diffraction (XRD) analysis were utilized to investigate the effects of thickness variation on the surface morphology and the crystallinity. The electrical and optical properties of the films were also investigated as a function of the film thickness. It was found that the crystalline quality, electrical and optical properties of the films depended on the film thickness and were improved with increasing the film thickness. This is attributed to the fact that the films thinner than 4000 {\AA} are under the severe misfit strain, which decreases with increasing the film thickness further.",

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Effects of thickness variation on properties of ZnO thin films grown by pulsed laser deposition. / Myoung, Jae Min; Yoon, Wook Hi; Lee, Dong Hi; Yun, Ilgu; Bae, Sang Hyuck; Lee, Sang Yeol.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 41, No. 1, 01.01.2002, p. 28-31.

Research output: Contribution to journal › Article

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AB - A series of ZnO films with various thicknesses were prepared on (0001) sapphire substrate by pulsed laser deposition (PLD). Scanning electron microscopy (SEM) and x-ray diffraction (XRD) analysis were utilized to investigate the effects of thickness variation on the surface morphology and the crystallinity. The electrical and optical properties of the films were also investigated as a function of the film thickness. It was found that the crystalline quality, electrical and optical properties of the films depended on the film thickness and were improved with increasing the film thickness. This is attributed to the fact that the films thinner than 4000 Å are under the severe misfit strain, which decreases with increasing the film thickness further.

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