The authors report properties of a -plane ZnO films on r -plane sapphire substrates by plasma-assisted molecular beam epitaxy in which two-step growth is employed. They show that the two-step growth is effective in improving structural and optical properties of a -plane ZnO films. Here, the two-step growth is preceded by growing the first layer under Zn-rich (O-rich) conditions and growing the second layer under O-rich (Zn-rich) conditions. All the grown samples show striated anisotropic morphology. The samples with the first, thin, O-rich layer plus the second, thick, Zn-rich layer show smaller root-mean-square (rms) roughness than those with the first, thin, Zn-rich layer plus the second, thick, O-rich layer. The sample with the 20-nm -thick first layer grown under O-rich condition shows the smallest rms roughness of 1.06 nm, which is a smaller rms value than that of the sample grown under the single-step, stoichiometric condition. This sample shows the highest intensity of D X0 emission at 3.392 eV and small full width at half maxima of (11 2- 0) and (10 1- 1) x-ray rocking curves, which indicate the good crystal quality.
|Number of pages||6|
|Journal||Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics|
|Publication status||Published - 2009|
Bibliographical noteFunding Information:
This work was supported by the Korea Science and Engineering Foundation (KOSEF) through Grant No. R01-2007-000-20282-0 and by the Korea Research Foundation (KRF) through Grant No. KRF-2005-205-D00078.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Process Chemistry and Technology
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
- Materials Chemistry