Micro electrical discharge machining process is widely used for making small holes and machining micro molds. Recently, micro-EDM process was applied to the deburring process in the microdevices. Burrs at the edge of the devices were removed effectively with minimizing damage of machined surface. The electric field strength between the electrode and the workpiece was analyzed according to the geometry of burrs. The analyzed electric strength was compared to the dielectric strength of kerosene. The electrical discharge mechanism at the burr instead of the surface of the wokrpiece plane was explained by the electric field strength distribution. The characteristics of micro-EDM deburring process in the microdevices were studied. Adujusting the electrode tool position precisely, the burrs on the surface remained could be removed successfully. In this research, through the electric strength analysis, the applying the micro-EDM process to the deburring process was suggested.