Electrical and ferroelectric properties of SBT thin films formed by photochemical metal-organic deposition

Hyeong Ho Park, Sang Bae Jung, Hyung Ho Park, Tae Song Kim, Ross H. Hill

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

The electrical and ferroelectric properties of SBT thin films prepared by photochemical metal-organic deposition using photosensitive starting precursors were characterized. Fourier transform infra-red spectroscopic observation showed that a complete removal of organic groups was possible by UV exposure of spin-coated SBT precursor film at room temperature. The values of measured remnant polarization and leakage current density at 400 kV/cm were 5.8 μC/cm2 and 3.48 × 10-8 A/cm2 after anneal treatment at 700 °C of the UV-exposed SBT precursor film and 10.8 μC/cm2 and 6.94 × 10-8 A/cm2 after anneal treatment at 750 °C. The SBT films annealed at 700 and 750 °C remained fatigue-free up to 1010 switching cycles.

Original languageEnglish
Pages (from-to)289-293
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume126
Issue number1
DOIs
Publication statusPublished - 2007 Sep 20

Bibliographical note

Funding Information:
This research has been supported by the Intelligent Microsystem Center (IMC: http://www.microsystem.re.kr ), which carries out one of the 21st century's Frontier R&D Projects sponsored by the Korea Ministry of Science and Technology.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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