TY - JOUR
T1 - Electrical and interfacial properties of nonalloyed Ti/Au ohmic and Pt Schottky contacts on Zn-terminated ZnO
AU - Kim, Han Ki
AU - Kim, Sang Woo
AU - Yang, Beelyong
AU - Kim, Sang Ho
AU - Lee, Kwang Hoon
AU - Ji, Seung Hyun
AU - Yoon, Young Soo
PY - 2006/3/8
Y1 - 2006/3/8
N2 - We report on the electrical and interfacial properties of nonalloyed Ti/Au ohmic and Pt Schottky contacts on Zn-terminated n-ZnO (1.5 × 10 17cm-3). Nonalloyed Ti/Au and Pt contacts on the Zn-terminated ZnO respectively exhibit ohmic and Schottky behavior owing to different work functions and out-diffusion characteristics. The nonalloyed Ti/Au contact reveals very linear current-voltage behavior with a specific contact resistivity of 2.2 × 10-5 Ωcm2. However, Pt contact shows Schottky behavior with Schottky barrier heights (SBHs) of 0.62 eV and 0.78 eV, obtained from current-voltage (I-V) and capacitance-voltage (C-V) measurements, respectively. Using Auger electron spectroscopy (AES), we correlated the electrical properties of the nonalloyed Ti/Au ohmic and Pt Schottky contacts with the properties of the interface between the metal and ZnO.
AB - We report on the electrical and interfacial properties of nonalloyed Ti/Au ohmic and Pt Schottky contacts on Zn-terminated n-ZnO (1.5 × 10 17cm-3). Nonalloyed Ti/Au and Pt contacts on the Zn-terminated ZnO respectively exhibit ohmic and Schottky behavior owing to different work functions and out-diffusion characteristics. The nonalloyed Ti/Au contact reveals very linear current-voltage behavior with a specific contact resistivity of 2.2 × 10-5 Ωcm2. However, Pt contact shows Schottky behavior with Schottky barrier heights (SBHs) of 0.62 eV and 0.78 eV, obtained from current-voltage (I-V) and capacitance-voltage (C-V) measurements, respectively. Using Auger electron spectroscopy (AES), we correlated the electrical properties of the nonalloyed Ti/Au ohmic and Pt Schottky contacts with the properties of the interface between the metal and ZnO.
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U2 - 10.1143/JJAP.45.1560
DO - 10.1143/JJAP.45.1560
M3 - Article
AN - SCOPUS:33644930613
SN - 0021-4922
VL - 45
SP - 1560
EP - 1565
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 3 A
ER -