Electrical and optical properties of Ga doped zinc oxide thin films deposited at room temperature by continuous composition spread

Keun Jung, Won Kook Choi, Seok Jin Yoon, Hyun Jae Kim, Ji Won Choi

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Ga doped ZnO (GZO) thin films were deposited on glass substrates at room temperature by continuous composition spread (CCS) method. CCS is thin films growth method of various Ga x Zn 1-x O(GZO) thin film compositions on a substrate, and evaluating critical properties as a function position, which is directly related to material composition. Various compositions of Ga doped ZnO deposited at room temperature were explored to find excellent electrical and optical properties. Optimized GZO thin films with a low resistivity of 1.46 × 10 -3 Ω cm and an average transmittance above 90% in the 550 nm wavelength region were able to be formed at an Ar pressure of 2.66 Pa and a room temperature. Also, optimized composition of the GZO thin film which had the lowest resistivity and high transmittance was found at 0.8 wt.% Ga 2 O 3 doped in ZnO.

Original languageEnglish
Pages (from-to)6219-6223
Number of pages5
JournalApplied Surface Science
Issue number21
Publication statusPublished - 2010 Aug 15


All Science Journal Classification (ASJC) codes

  • Surfaces, Coatings and Films

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