Aluminum-doped zinc oxide (AZO) thin films were prepared on glass substrate using a magnetron sputtering system. In this work, a powder target was used as a source material for low cost applications, instead of a conventional sintered ceramic target. The effects of the hydrogen gas ratio on the electrical and optical properties of the AZO films. The hydrogen doped AZO (AZO:H) films had a hexagonal polycrystalline structure. A small amount of hydrogen gas deteriorated the electrical and optical properties of the AZO:H films. However, these properties improved, as the H2/(H2+Ar) gas ratio increased. The AZO:H films grown at an H2/(H2+Ar) ratio of 10% showed good properties for low cost applications, such as a low resistivity of 1.35 × 10-3 Ω-cm, high average transmittance of 83.1% in the visible range of light.
|Number of pages||4|
|Journal||Journal of Nanoscience and Nanotechnology|
|Publication status||Published - 2016 May|
Bibliographical noteFunding Information:
This work was supported by a grant from the Korea Research Foundation (KRF), funded by the Korean government (MEST) (No. 2012R1A1A2008591). In addition, this work was also supported by the Human Resources Development program (No. 20144030200580) of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korean government Ministry of Trade, Industry and Energy.
Copyright © 2016 American Scientific Publishers All rights reserved.
All Science Journal Classification (ASJC) codes
- Biomedical Engineering
- Materials Science(all)
- Condensed Matter Physics