Electrical and optical properties of hydrogen doped aluminum-doped zinc oxide thin films for low cost applications

Yong Seob Park; Young Park; Samyoung Kwon; Eung Kwon Kim; Wonseok Choi; Donguk Kim; Minha Kim; Jaehyeong Lee

doi:10.1166/jnn.2016.12184

Electrical and optical properties of hydrogen doped aluminum-doped zinc oxide thin films for low cost applications

Yong Seob Park, Young Park, Samyoung Kwon, Eung Kwon Kim, Wonseok Choi, Donguk Kim, Minha Kim, Jaehyeong Lee

Department of Ophthalmology

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Aluminum-doped zinc oxide (AZO) thin films were prepared on glass substrate using a magnetron sputtering system. In this work, a powder target was used as a source material for low cost applications, instead of a conventional sintered ceramic target. The effects of the hydrogen gas ratio on the electrical and optical properties of the AZO films. The hydrogen doped AZO (AZO:H) films had a hexagonal polycrystalline structure. A small amount of hydrogen gas deteriorated the electrical and optical properties of the AZO:H films. However, these properties improved, as the H₂/(H₂+Ar) gas ratio increased. The AZO:H films grown at an H₂/(H₂+Ar) ratio of 10% showed good properties for low cost applications, such as a low resistivity of 1.35 × 10^-3 Ω-cm, high average transmittance of 83.1% in the visible range of light.

Original language	English
Pages (from-to)	5096-5099
Number of pages	4
Journal	Journal of Nanoscience and Nanotechnology
Volume	16
Issue number	5
DOIs	https://doi.org/10.1166/jnn.2016.12184
Publication status	Published - 2016 May

Bibliographical note

Funding Information:
This work was supported by a grant from the Korea Research Foundation (KRF), funded by the Korean government (MEST) (No. 2012R1A1A2008591). In addition, this work was also supported by the Human Resources Development program (No. 20144030200580) of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korean government Ministry of Trade, Industry and Energy.

Publisher Copyright:
Copyright © 2016 American Scientific Publishers All rights reserved.

All Science Journal Classification (ASJC) codes

Bioengineering
Chemistry(all)
Biomedical Engineering
Materials Science(all)
Condensed Matter Physics

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10.1166/jnn.2016.12184

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title = "Electrical and optical properties of hydrogen doped aluminum-doped zinc oxide thin films for low cost applications",

abstract = "Aluminum-doped zinc oxide (AZO) thin films were prepared on glass substrate using a magnetron sputtering system. In this work, a powder target was used as a source material for low cost applications, instead of a conventional sintered ceramic target. The effects of the hydrogen gas ratio on the electrical and optical properties of the AZO films. The hydrogen doped AZO (AZO:H) films had a hexagonal polycrystalline structure. A small amount of hydrogen gas deteriorated the electrical and optical properties of the AZO:H films. However, these properties improved, as the H2/(H2+Ar) gas ratio increased. The AZO:H films grown at an H2/(H2+Ar) ratio of 10% showed good properties for low cost applications, such as a low resistivity of 1.35 × 10-3 Ω-cm, high average transmittance of 83.1% in the visible range of light.",

author = "Park, {Yong Seob} and Young Park and Samyoung Kwon and Kim, {Eung Kwon} and Wonseok Choi and Donguk Kim and Minha Kim and Jaehyeong Lee",

note = "Funding Information: This work was supported by a grant from the Korea Research Foundation (KRF), funded by the Korean government (MEST) (No. 2012R1A1A2008591). In addition, this work was also supported by the Human Resources Development program (No. 20144030200580) of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korean government Ministry of Trade, Industry and Energy. Publisher Copyright: Copyright {\textcopyright} 2016 American Scientific Publishers All rights reserved.",

year = "2016",

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doi = "10.1166/jnn.2016.12184",

language = "English",

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AU - Kwon, Samyoung

AU - Kim, Eung Kwon

AU - Choi, Wonseok

AU - Kim, Donguk

AU - Kim, Minha

AU - Lee, Jaehyeong

N1 - Funding Information: This work was supported by a grant from the Korea Research Foundation (KRF), funded by the Korean government (MEST) (No. 2012R1A1A2008591). In addition, this work was also supported by the Human Resources Development program (No. 20144030200580) of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korean government Ministry of Trade, Industry and Energy. Publisher Copyright: Copyright © 2016 American Scientific Publishers All rights reserved.

PY - 2016/5

Y1 - 2016/5

N2 - Aluminum-doped zinc oxide (AZO) thin films were prepared on glass substrate using a magnetron sputtering system. In this work, a powder target was used as a source material for low cost applications, instead of a conventional sintered ceramic target. The effects of the hydrogen gas ratio on the electrical and optical properties of the AZO films. The hydrogen doped AZO (AZO:H) films had a hexagonal polycrystalline structure. A small amount of hydrogen gas deteriorated the electrical and optical properties of the AZO:H films. However, these properties improved, as the H2/(H2+Ar) gas ratio increased. The AZO:H films grown at an H2/(H2+Ar) ratio of 10% showed good properties for low cost applications, such as a low resistivity of 1.35 × 10-3 Ω-cm, high average transmittance of 83.1% in the visible range of light.

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Electrical and optical properties of hydrogen doped aluminum-doped zinc oxide thin films for low cost applications

Abstract

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