Electrical and optical properties of indium zinc oxide (IZO) thin films by continuous composition spread

J. J. Lee, J. S. Kim, S. J. Yoon, Y. S. Cho, J. W. Choi

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Indium zinc oxide (IZO) films were deposited on glass substrate at room temperature using off-axis RF sputtering-continuous composition spread (CCS) system. The full range composition of IZO films were controlled by the deposition rate and thickness profiles of In2O3 and ZnO target. The structural, electrical and optical properties of IZO thin films were measured as functions of position. IZO thin film had the lowest resistivity and highest carrier concentration at the position of 15 mm (5.02 × 10 -4 Ω cm, 3.9 × 1020/cm3). And IZO thin film had high transmittance in visible region at measured all positions. This study has investigated to explore the new composition of IZO films using CCS system.

Original languageEnglish
Pages (from-to)3317-3320
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume13
Issue number5
DOIs
Publication statusPublished - 2013 May 1

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All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Biomedical Engineering
  • Materials Science(all)
  • Condensed Matter Physics

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