Electrical and optical properties of ITO:Ca composite thin films for TEOLED cathode

W. S. Jung; S. G. Yoon; S. M. Kang; S. W. Kim; D. H. Yoon

doi:10.1016/j.tsf.2007.07.070

Electrical and optical properties of ITO:Ca composite thin films for TEOLED cathode

W. S. Jung, S. G. Yoon, S. M. Kang, S. W. Kim, D. H. Yoon

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

ITO:Ca composite thin films were deposited on glass substrate by the rf magnetron co-sputtering method with various numbers of Ca chips and oxygen partial pressures. The carrier concentration of the ITO:Ca thin film was 7 × 10²⁰ cm^{- 3} when the number of Ca chips was 4 at an oxygen partial pressure of 1.4%. The sheet resistance and optical transmittance of the ITO:Ca thin films were 68.2 Ω/sq. and 87%, respectively. The work function of the ITO:Ca thin films with 8 Ca chips was changed from 4.6 eV to 5.0 eV when the oxygen partial pressure was increased from 0.8% to 2.2%. When the oxygen partial pressure was 1.2%, a low work function of 4.6 eV was obtained for the ITO:Ca thin films.

Original language	English
Pages (from-to)	5445-5448
Number of pages	4
Journal	Thin Solid Films
Volume	516
Issue number	16
DOIs	https://doi.org/10.1016/j.tsf.2007.07.070
Publication status	Published - 2008 Jun 30

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2007.07.070

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title = "Electrical and optical properties of ITO:Ca composite thin films for TEOLED cathode",

abstract = "ITO:Ca composite thin films were deposited on glass substrate by the rf magnetron co-sputtering method with various numbers of Ca chips and oxygen partial pressures. The carrier concentration of the ITO:Ca thin film was 7 × 1020 cm- 3 when the number of Ca chips was 4 at an oxygen partial pressure of 1.4%. The sheet resistance and optical transmittance of the ITO:Ca thin films were 68.2 Ω/sq. and 87%, respectively. The work function of the ITO:Ca thin films with 8 Ca chips was changed from 4.6 eV to 5.0 eV when the oxygen partial pressure was increased from 0.8% to 2.2%. When the oxygen partial pressure was 1.2%, a low work function of 4.6 eV was obtained for the ITO:Ca thin films.",

author = "Jung, {W. S.} and Yoon, {S. G.} and Kang, {S. M.} and Kim, {S. W.} and Yoon, {D. H.}",

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T1 - Electrical and optical properties of ITO:Ca composite thin films for TEOLED cathode

AU - Jung, W. S.

AU - Yoon, S. G.

AU - Kang, S. M.

AU - Kim, S. W.

AU - Yoon, D. H.

PY - 2008/6/30

Y1 - 2008/6/30

N2 - ITO:Ca composite thin films were deposited on glass substrate by the rf magnetron co-sputtering method with various numbers of Ca chips and oxygen partial pressures. The carrier concentration of the ITO:Ca thin film was 7 × 1020 cm- 3 when the number of Ca chips was 4 at an oxygen partial pressure of 1.4%. The sheet resistance and optical transmittance of the ITO:Ca thin films were 68.2 Ω/sq. and 87%, respectively. The work function of the ITO:Ca thin films with 8 Ca chips was changed from 4.6 eV to 5.0 eV when the oxygen partial pressure was increased from 0.8% to 2.2%. When the oxygen partial pressure was 1.2%, a low work function of 4.6 eV was obtained for the ITO:Ca thin films.

AB - ITO:Ca composite thin films were deposited on glass substrate by the rf magnetron co-sputtering method with various numbers of Ca chips and oxygen partial pressures. The carrier concentration of the ITO:Ca thin film was 7 × 1020 cm- 3 when the number of Ca chips was 4 at an oxygen partial pressure of 1.4%. The sheet resistance and optical transmittance of the ITO:Ca thin films were 68.2 Ω/sq. and 87%, respectively. The work function of the ITO:Ca thin films with 8 Ca chips was changed from 4.6 eV to 5.0 eV when the oxygen partial pressure was increased from 0.8% to 2.2%. When the oxygen partial pressure was 1.2%, a low work function of 4.6 eV was obtained for the ITO:Ca thin films.

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JO - Thin Solid Films

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Electrical and optical properties of ITO:Ca composite thin films for TEOLED cathode

Abstract

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