Electrical characterization and conduction mechanism of high-k Ti 1-xSixO2 gate dielectrics

Chang Eun Kim, Pyung Moon, Edward Namkyu Cho, Sungyeon Kim, Jae Min Myoung, Ilgu Yun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Electrical characterization and conduction mechanism of high-k Ti 1-xSixO2 gate dielectrics'. Together they form a unique fingerprint.

Engineering & Materials Science