Electrical characterization and conduction mechanism of high-k Ti 1-xSixO2 gate dielectrics

Chang Eun Kim, Pyung Moon, Edward Namkyu Cho, Sungyeon Kim, Jae Min Myoung, Ilgu Yun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

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Engineering & Materials Science