Electrical conductivity in Li-Si-P-O-N oxynitride thin-films

Seung Joo Lee, Jun Hyun Bae, Hee Won Lee, Hong Koo Baik, Sung Man Lee

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

Nitrogen-incorporated lithium silicophosphate (LiSiPON) thin-film electrolytes, which contain two glass-forming elements, are fabricated by sputtering from a (1 - x)Li3PO4·xLi2SiO3 target in a nitrogen reactive plasma. The results of impedance measurements show that the activation energy for conduction decreases as the Si content increases, which leads to an increase in the ionic conductivity of the films. It is suggested that these improvements in the electrical properties of the films are due to the combined effect of the mixed former and nitrogen incorporation. It appears that the decomposition potential of the electrolyte film in contact with Pt is about 5.5 V.

Original languageEnglish
Pages (from-to)61-64
Number of pages4
JournalJournal of Power Sources
Volume123
Issue number1
DOIs
Publication statusPublished - 2003 Sep 15

Fingerprint

oxynitrides
Nitrogen
nitrogen
Thin films
Electrolytes
electrical resistivity
thin films
electrolytes
impedance measurement
Ionic conductivity
Lithium
ion currents
Sputtering
Electric properties
Activation energy
lithium
sputtering
electrical properties
activation energy
Decomposition

All Science Journal Classification (ASJC) codes

  • Renewable Energy, Sustainability and the Environment
  • Energy Engineering and Power Technology
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering

Cite this

Lee, Seung Joo ; Bae, Jun Hyun ; Lee, Hee Won ; Baik, Hong Koo ; Lee, Sung Man. / Electrical conductivity in Li-Si-P-O-N oxynitride thin-films. In: Journal of Power Sources. 2003 ; Vol. 123, No. 1. pp. 61-64.
@article{c698b3e629ec4a109344b3745c0f02ab,
title = "Electrical conductivity in Li-Si-P-O-N oxynitride thin-films",
abstract = "Nitrogen-incorporated lithium silicophosphate (LiSiPON) thin-film electrolytes, which contain two glass-forming elements, are fabricated by sputtering from a (1 - x)Li3PO4·xLi2SiO3 target in a nitrogen reactive plasma. The results of impedance measurements show that the activation energy for conduction decreases as the Si content increases, which leads to an increase in the ionic conductivity of the films. It is suggested that these improvements in the electrical properties of the films are due to the combined effect of the mixed former and nitrogen incorporation. It appears that the decomposition potential of the electrolyte film in contact with Pt is about 5.5 V.",
author = "Lee, {Seung Joo} and Bae, {Jun Hyun} and Lee, {Hee Won} and Baik, {Hong Koo} and Lee, {Sung Man}",
year = "2003",
month = "9",
day = "15",
doi = "10.1016/S0378-7753(03)00457-9",
language = "English",
volume = "123",
pages = "61--64",
journal = "Journal of Power Sources",
issn = "0378-7753",
publisher = "Elsevier",
number = "1",

}

Electrical conductivity in Li-Si-P-O-N oxynitride thin-films. / Lee, Seung Joo; Bae, Jun Hyun; Lee, Hee Won; Baik, Hong Koo; Lee, Sung Man.

In: Journal of Power Sources, Vol. 123, No. 1, 15.09.2003, p. 61-64.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Electrical conductivity in Li-Si-P-O-N oxynitride thin-films

AU - Lee, Seung Joo

AU - Bae, Jun Hyun

AU - Lee, Hee Won

AU - Baik, Hong Koo

AU - Lee, Sung Man

PY - 2003/9/15

Y1 - 2003/9/15

N2 - Nitrogen-incorporated lithium silicophosphate (LiSiPON) thin-film electrolytes, which contain two glass-forming elements, are fabricated by sputtering from a (1 - x)Li3PO4·xLi2SiO3 target in a nitrogen reactive plasma. The results of impedance measurements show that the activation energy for conduction decreases as the Si content increases, which leads to an increase in the ionic conductivity of the films. It is suggested that these improvements in the electrical properties of the films are due to the combined effect of the mixed former and nitrogen incorporation. It appears that the decomposition potential of the electrolyte film in contact with Pt is about 5.5 V.

AB - Nitrogen-incorporated lithium silicophosphate (LiSiPON) thin-film electrolytes, which contain two glass-forming elements, are fabricated by sputtering from a (1 - x)Li3PO4·xLi2SiO3 target in a nitrogen reactive plasma. The results of impedance measurements show that the activation energy for conduction decreases as the Si content increases, which leads to an increase in the ionic conductivity of the films. It is suggested that these improvements in the electrical properties of the films are due to the combined effect of the mixed former and nitrogen incorporation. It appears that the decomposition potential of the electrolyte film in contact with Pt is about 5.5 V.

UR - http://www.scopus.com/inward/record.url?scp=0043201292&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0043201292&partnerID=8YFLogxK

U2 - 10.1016/S0378-7753(03)00457-9

DO - 10.1016/S0378-7753(03)00457-9

M3 - Article

AN - SCOPUS:0043201292

VL - 123

SP - 61

EP - 64

JO - Journal of Power Sources

JF - Journal of Power Sources

SN - 0378-7753

IS - 1

ER -