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Dive into the research topics of 'Electrical properties of Al<sub>2</sub>O<sub>3</sub> film deposited at low temperatures'. Together they form a unique fingerprint.
Chemical Compounds
Electric properties
Aluminum oxide
Gate dielectrics
Voltage measurement
Temperature
Capacitance
Capacitance measurement
Roughness measurement
Magnetron sputtering
Thin film transistors
Electric current measurement
Leakage currents
Surface roughness
Engineering & Materials Science
Electric properties
Aluminum oxide
Gate dielectrics
Voltage measurement
Temperature
Capacitance
Capacitance measurement
Roughness measurement
Magnetron sputtering
Thin film transistors
Electric current measurement
Leakage currents
Surface roughness
Physics & Astronomy
electrical properties
capacitance
electrical measurement
room temperature
electrical faults
surface roughness
magnetron sputtering
leakage
roughness
transistors
thin films