Electrical properties of aluminum oxide films deposited on indium-tin-oxide glasses

Jiyoul Lee, S. S. Kim, Seongil Im

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Original language	English
Pages (from-to)	953-956
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	3
DOIs	https://doi.org/10.1116/1.1565344
Publication status	Published - 2003

All Science Journal Classification (ASJC) codes

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title = "Electrical properties of aluminum oxide films deposited on indium-tin-oxide glasses",

author = "Jiyoul Lee and Kim, {S. S.} and Seongil Im",

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AU - Kim, S. S.

AU - Im, Seongil

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JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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