Electrical properties of aluminum oxide films deposited on indium-tin-oxide glasses

Jiyoul Lee, S. S. Kim, Seongil Im

Research output: Contribution to journalArticle

22 Citations (Scopus)
Original languageEnglish
Pages (from-to)953-956
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number3
DOIs
Publication statusPublished - 2003

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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