| Original language | English |
|---|---|
| Pages (from-to) | 953-956 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 21 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2003 |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering