Electrical properties of atomic layer deposition HfO2 and HfOx Ny on Si substrates with various crystal orientations

W. J. Maeng, Hyungjun Kim

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18 Citations (Scopus)

Abstract

The use of high- k gate oxide on Si substrates with alternative orientations is expected to contribute for the fabrication of high mobility devices. In this paper, the interfacial and electrical properties of the plasma enhanced atomic layer deposition (PE-ALD) HfO2 and HfOx Ny gate oxides on Si substrates with three different crystal orientations, (001), (011), and (111), were comparatively studied. While PE-ALD HfO2 films were prepared using oxygen plasma as a reactant, PE-ALD HfOx Ny films were prepared by in situ nitridation using oxygen/nitrogen mixture plasma. For all crystal orientations, in situ nitridation using oxygen/nitrogen mixture plasma improved electrical properties producing lower leakage currents and smaller equivalent oxide thickness values. Both HfO2 and HfOx Ny films have shown the lowest leakage current and interface state density on Si(001), whereas the poorest electrical properties were obtained on Si(111). The results are discussed based on the experimental results obtained from various analytical techniques, including I-V, C-V, conductance methods, and X-ray photoelectron spectroscopy.

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume155
Issue number4
DOIs
Publication statusPublished - 2008 Mar 14

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Atomic layer deposition
Crystal orientation
Electric properties
Plasmas
Substrates
Oxides
Nitridation
Oxygen
Leakage currents
Nitrogen
Interface states
X ray photoelectron spectroscopy
Fabrication

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

Cite this

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abstract = "The use of high- k gate oxide on Si substrates with alternative orientations is expected to contribute for the fabrication of high mobility devices. In this paper, the interfacial and electrical properties of the plasma enhanced atomic layer deposition (PE-ALD) HfO2 and HfOx Ny gate oxides on Si substrates with three different crystal orientations, (001), (011), and (111), were comparatively studied. While PE-ALD HfO2 films were prepared using oxygen plasma as a reactant, PE-ALD HfOx Ny films were prepared by in situ nitridation using oxygen/nitrogen mixture plasma. For all crystal orientations, in situ nitridation using oxygen/nitrogen mixture plasma improved electrical properties producing lower leakage currents and smaller equivalent oxide thickness values. Both HfO2 and HfOx Ny films have shown the lowest leakage current and interface state density on Si(001), whereas the poorest electrical properties were obtained on Si(111). The results are discussed based on the experimental results obtained from various analytical techniques, including I-V, C-V, conductance methods, and X-ray photoelectron spectroscopy.",
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AU - Kim, Hyungjun

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N2 - The use of high- k gate oxide on Si substrates with alternative orientations is expected to contribute for the fabrication of high mobility devices. In this paper, the interfacial and electrical properties of the plasma enhanced atomic layer deposition (PE-ALD) HfO2 and HfOx Ny gate oxides on Si substrates with three different crystal orientations, (001), (011), and (111), were comparatively studied. While PE-ALD HfO2 films were prepared using oxygen plasma as a reactant, PE-ALD HfOx Ny films were prepared by in situ nitridation using oxygen/nitrogen mixture plasma. For all crystal orientations, in situ nitridation using oxygen/nitrogen mixture plasma improved electrical properties producing lower leakage currents and smaller equivalent oxide thickness values. Both HfO2 and HfOx Ny films have shown the lowest leakage current and interface state density on Si(001), whereas the poorest electrical properties were obtained on Si(111). The results are discussed based on the experimental results obtained from various analytical techniques, including I-V, C-V, conductance methods, and X-ray photoelectron spectroscopy.

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