Electrical properties of photo-CVD boron-doped hydrogenated nanocrystalline silicon-carbide (p-nc-SiC:H) films for uncooled IR bolometer applications

Hyung Kew Lee, Seung Yeop Myong, Koeng Su Lim, Euisik Yoon

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

Abstract

Electrical properties of boron-doped nanocrystalline silicon-carbide (p-nc-SiC:H) films grown by mercury-sensitized photo-chemical vapor deposition method have been investigated for uncooled IR bolometer applications. The temperature coefficient of resistance (TCR), conductivity, and 1/f noise characteristics have been measured and the detectivity of a bolometer has been estimated from them. It has been observed that as ethylene gas flow ratio (C2H4/SiH4) increases, TCR of films increases due to larger optical bandgap. However, the 1/f noise also increases due to the reduction of the number of total carriers in the films for higher activation energy (Ea). The maximum TCR of 2.3%/K has been measured for the films deposited with an ethylene gas flow ratio of 0.47, while the maximum detectivity has been estimated for those with an ethylene gas flow ratio of 0.07 because of the lowest 1/f noise.

Original languageEnglish
Pages (from-to)297-301
Number of pages5
JournalJournal of Non-Crystalline Solids
Volume316
Issue number2-3
DOIs
Publication statusPublished - 2003 Feb

Bibliographical note

Funding Information:
This work has been partially supported by the G7 project from Ministry of Industry and Energy and Ministry of Science and Technology of Korea, and partially supported by Micro Information and Communication Remote Object-oriented System (MICROS) Research Center at KAIST. The authors thank Chan-Hyung Park from Seoul National University for his advice in noise measurement.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

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