Electrically integrated SU-8 clamped graphene drum resonators for strain engineering

Sunwoo Lee, Changyao Chen, Vikram V. Deshpande, Gwan Hyoung Lee, Ilkyu Lee, Michael Lekas, Alexander Gondarenko, Young Jun Yu, Kenneth Shepard, Philip Kim, James Hone

Research output: Contribution to journalArticlepeer-review

47 Citations (Scopus)

Abstract

Graphene mechanical resonators are the ultimate two-dimensional nanoelectromechanical systems (NEMS) with applications in sensing and signal processing. While initial devices have shown promising results, an ideal graphene NEMS resonator should be strain engineered, clamped at the edge without trapping gas underneath, and electrically integratable. In this Letter, we demonstrate fabrication and direct electrical measurement of circular SU-8 polymer-clamped chemical vapor deposition graphene drum resonators. The clamping increases device yield and responsivity, while providing a cleaner resonance spectrum from eliminated edge modes. Furthermore, the clamping induces a large strain in the resonator, increasing its resonant frequency.

Original languageEnglish
Article number153101
JournalApplied Physics Letters
Volume102
Issue number15
DOIs
Publication statusPublished - 2013 Apr 15

Bibliographical note

Funding Information:
The authors like to thank Arend M. van der Zande, Nicholas Petrone, Victor Abramsky, Eugene Hwang, Changhyuk Lee, Jaeyoon Kim, Adam M. Hurst, Jerry D. Smith, and Bo Hyun Kim for critical discussions. Fabrication was performed at the Cornell Nano-Scale Facility, a member of the National Nanotechnology Infrastructure Network, which is supported by the National Science Foundation (Grant ECS-0335765), and Center for Engineering and Physical Science Research (CEPSR) Clean Room at Columba University. The authors acknowledge the support by Qualcomm Innovation Fellowship (QInF) 2012 and AFOSR MURI FA9550-09-1-0705.

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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