Electrically integrated SU-8 clamped graphene drum resonators for strain engineering

Sunwoo Lee, Changyao Chen, Vikram V. Deshpande, Gwan Hyoung Lee, Ilkyu Lee, Michael Lekas, Alexander Gondarenko, Young Jun Yu, Kenneth Shepard, Philip Kim, James Hone

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44 Citations (Scopus)

Abstract

Graphene mechanical resonators are the ultimate two-dimensional nanoelectromechanical systems (NEMS) with applications in sensing and signal processing. While initial devices have shown promising results, an ideal graphene NEMS resonator should be strain engineered, clamped at the edge without trapping gas underneath, and electrically integratable. In this Letter, we demonstrate fabrication and direct electrical measurement of circular SU-8 polymer-clamped chemical vapor deposition graphene drum resonators. The clamping increases device yield and responsivity, while providing a cleaner resonance spectrum from eliminated edge modes. Furthermore, the clamping induces a large strain in the resonator, increasing its resonant frequency.

Original languageEnglish
Article number153101
JournalApplied Physics Letters
Volume102
Issue number15
DOIs
Publication statusPublished - 2013 Apr 15

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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    Lee, S., Chen, C., Deshpande, V. V., Lee, G. H., Lee, I., Lekas, M., Gondarenko, A., Yu, Y. J., Shepard, K., Kim, P., & Hone, J. (2013). Electrically integrated SU-8 clamped graphene drum resonators for strain engineering. Applied Physics Letters, 102(15), [153101]. https://doi.org/10.1063/1.4793302