Electron beam induced epitaxial crystallization in a conducting and insulating a-LaAlO 3 /SrTiO 3 system

Gwangyeob Lee, Seon Young Moon, Jinyeon Kim, Seung Hyub Baek, Do Hyang Kim, Ho Won Jang, Hye Jung Chang

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Interfacial conductivity at the interface between two insulating oxides, that is 2DEG, shows a number of intriguing properties and applications, such as on/off switching with external electric fields, use in nanoscale electronic devices and tunable conductivity. Here, we report the effect of the interfacial conductivity on the kinetic behavior of electron-beam-induced epitaxial crystallization of an oxide amorphous thin film on an SrTiO 3 substrate. Epitaxial growth from the interface can occur without direct e-beam irradiation at the interface due to accumulated charge around the beam position in the insulating materials. 2DEG, which acts as a current path delays the crystallization kinetics, thus delicate control of the crystallized pattern shape and size is available. As a result, successful pattern writing with a width of about 5 nm was performed. The present work provides useful guidelines for coherent atomic scale e-beam patterning considering the critical distance of the electron beam from the interface for the epitaxial growth, e-beam dose rate effect on the growth rate and the heterostructure interfacial conductivity.

Original languageEnglish
Pages (from-to)40279-40285
Number of pages7
JournalRSC Advances
Volume7
Issue number64
DOIs
Publication statusPublished - 2017 Jan 1

Fingerprint

Two dimensional electron gas
Crystallization
Epitaxial growth
Oxides
Electron beams
Crystallization kinetics
Insulating materials
Amorphous films
Heterojunctions
Electric fields
Irradiation
Thin films
Substrates

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Chemical Engineering(all)

Cite this

Lee, Gwangyeob ; Moon, Seon Young ; Kim, Jinyeon ; Baek, Seung Hyub ; Kim, Do Hyang ; Jang, Ho Won ; Chang, Hye Jung. / Electron beam induced epitaxial crystallization in a conducting and insulating a-LaAlO 3 /SrTiO 3 system In: RSC Advances. 2017 ; Vol. 7, No. 64. pp. 40279-40285.
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Electron beam induced epitaxial crystallization in a conducting and insulating a-LaAlO 3 /SrTiO 3 system . / Lee, Gwangyeob; Moon, Seon Young; Kim, Jinyeon; Baek, Seung Hyub; Kim, Do Hyang; Jang, Ho Won; Chang, Hye Jung.

In: RSC Advances, Vol. 7, No. 64, 01.01.2017, p. 40279-40285.

Research output: Contribution to journalArticle

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