Electron emission from diamond and carbon nitride grown by hot filament CVD or helical resonator PECVD

Joon Chi Eung, Yeob Shim Jae, Joon Rho Soon, Koo Baik Hong

Research output: Contribution to journalConference article

Abstract

To improve silicon field emitters, diamond and carbon nitride coatings were applied by hot filament CVD and helical resonator CVD, respectively. Helical resonator CVD was first proposed as a new method to grow carbon nitride on silicon tips without damage. Diamond and carbon nitride coatings lowered turn-on voltage and increased emission current. Microstructural and electronic investigations of carbon nitride film were performed. The negative electron affinity of carbon nitride is suggested for enhancing emission current.

Original languageEnglish
Pages (from-to)375-380
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume424
Publication statusPublished - 1996 Dec 1
EventProceedings of the 1996 MRS Spring Meeting - San Francisco, CA, USA
Duration: 1996 Apr 81996 Apr 12

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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