Electron emission from diamond and carbon nitride grown by hot filament CVD or helical resonator PECVD

Joon Chi Eung, Yeob Shim Jae, Joon Rho Soon, Koo Baik Hong

Research output: Contribution to journalConference article

Abstract

To improve silicon field emitters, diamond and carbon nitride coatings were applied by hot filament CVD and helical resonator CVD, respectively. Helical resonator CVD was first proposed as a new method to grow carbon nitride on silicon tips without damage. Diamond and carbon nitride coatings lowered turn-on voltage and increased emission current. Microstructural and electronic investigations of carbon nitride film were performed. The negative electron affinity of carbon nitride is suggested for enhancing emission current.

Original languageEnglish
Pages (from-to)375-380
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume424
Publication statusPublished - 1996 Dec 1
EventProceedings of the 1996 MRS Spring Meeting - San Francisco, CA, USA
Duration: 1996 Apr 81996 Apr 12

Fingerprint

Diamond
carbon nitrides
Carbon nitride
Electron emission
Plasma enhanced chemical vapor deposition
electron emission
nitrides
Resonators
Chemical vapor deposition
Diamonds
filaments
resonators
diamonds
vapor deposition
Silicon
negative electron affinity
coatings
Coatings
Electron affinity
silicon

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

@article{5bf68d8071dd4c09bde697e044eb9310,
title = "Electron emission from diamond and carbon nitride grown by hot filament CVD or helical resonator PECVD",
abstract = "To improve silicon field emitters, diamond and carbon nitride coatings were applied by hot filament CVD and helical resonator CVD, respectively. Helical resonator CVD was first proposed as a new method to grow carbon nitride on silicon tips without damage. Diamond and carbon nitride coatings lowered turn-on voltage and increased emission current. Microstructural and electronic investigations of carbon nitride film were performed. The negative electron affinity of carbon nitride is suggested for enhancing emission current.",
author = "Eung, {Joon Chi} and Jae, {Yeob Shim} and Soon, {Joon Rho} and Hong, {Koo Baik}",
year = "1996",
month = "12",
day = "1",
language = "English",
volume = "424",
pages = "375--380",
journal = "Materials Research Society Symposium - Proceedings",
issn = "0272-9172",
publisher = "Materials Research Society",

}

Electron emission from diamond and carbon nitride grown by hot filament CVD or helical resonator PECVD. / Eung, Joon Chi; Jae, Yeob Shim; Soon, Joon Rho; Hong, Koo Baik.

In: Materials Research Society Symposium - Proceedings, Vol. 424, 01.12.1996, p. 375-380.

Research output: Contribution to journalConference article

TY - JOUR

T1 - Electron emission from diamond and carbon nitride grown by hot filament CVD or helical resonator PECVD

AU - Eung, Joon Chi

AU - Jae, Yeob Shim

AU - Soon, Joon Rho

AU - Hong, Koo Baik

PY - 1996/12/1

Y1 - 1996/12/1

N2 - To improve silicon field emitters, diamond and carbon nitride coatings were applied by hot filament CVD and helical resonator CVD, respectively. Helical resonator CVD was first proposed as a new method to grow carbon nitride on silicon tips without damage. Diamond and carbon nitride coatings lowered turn-on voltage and increased emission current. Microstructural and electronic investigations of carbon nitride film were performed. The negative electron affinity of carbon nitride is suggested for enhancing emission current.

AB - To improve silicon field emitters, diamond and carbon nitride coatings were applied by hot filament CVD and helical resonator CVD, respectively. Helical resonator CVD was first proposed as a new method to grow carbon nitride on silicon tips without damage. Diamond and carbon nitride coatings lowered turn-on voltage and increased emission current. Microstructural and electronic investigations of carbon nitride film were performed. The negative electron affinity of carbon nitride is suggested for enhancing emission current.

UR - http://www.scopus.com/inward/record.url?scp=0030398487&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030398487&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0030398487

VL - 424

SP - 375

EP - 380

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

SN - 0272-9172

ER -