Abstract
To improve silicon field emitters, diamond and carbon nitride coatings were applied by hot filament CVD and helical resonator CVD, respectively. Helical resonator CVD was first proposed as a new method to grow carbon nitride on silicon tips without damage. Diamond and carbon nitride coatings lowered turn-on voltage and increased emission current. Microstructural and electronic investigations of carbon nitride film were performed. The negative electron affinity of carbon nitride is suggested for enhancing emission current.
| Original language | English |
|---|---|
| Pages (from-to) | 375-380 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 424 |
| Publication status | Published - 1996 |
| Event | Proceedings of the 1996 MRS Spring Meeting - San Francisco, CA, USA Duration: 1996 Apr 8 → 1996 Apr 12 |
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering