Electrostatic digital micromirror using interdigitated cantilevers

Jin Wan Jeon, Byeong Il Kim, Ji hyuk Kim, Hyung kew Lee, Jun Bo Yoon, Euisik Yoon, Koeng Su Lim

Research output: Contribution to conferencePaper

5 Citations (Scopus)

Abstract

We have proposed an electrostatic digital micromirror utilizing interdigitated cantilevers. The electrostatically-actuated microstructure has been fabricated by the electroplated-nickel surface micromachining. Thanks to the unique design of the interdigitated cantilevers, the micromirror has an operational mechanism of a seesaw allowing accurate, reliable control of the final rotating angle. The fabricated digital micromirror has shown the rotating angle of ±9 degrees with an actuation voltage of 60 V.

Original languageEnglish
Pages528-531
Number of pages4
Publication statusPublished - 2002 Jan 1
Event15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States
Duration: 2002 Jan 202002 Jan 24

Conference

Conference15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
CountryUnited States
CityLas Vegas, NV
Period02/1/2002/1/24

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Jeon, J. W., Kim, B. I., Kim, J. H., Lee, H. K., Yoon, J. B., Yoon, E., & Lim, K. S. (2002). Electrostatic digital micromirror using interdigitated cantilevers. 528-531. Paper presented at 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, Las Vegas, NV, United States.