Electrostatic scanning micromirrors using localized plastic deformation of silicon

Jongbaeg Kim, Liwei Lin

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)

Fingerprint Dive into the research topics of 'Electrostatic scanning micromirrors using localized plastic deformation of silicon'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science