Electrothermal tuning of nanomechanical silicon carbide resonators has been demonstrated. The detected mechanical resonance of the untuned resonator was 10.12MHz and has a quality factor of about 2000 as measured using the magnetomotive transduction technique. Also, the resonance frequency was tuned by 10 with Joule heating of DC current.
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering