We report the energy-band alignment of atomic layer-deposited (ALD) beryllium oxide (BeO) films and β-Ga2O3 substrates. BeO is a unique oxide with a high dielectric constant and bandgap energy that can be used as a gate dielectric; however, it also has an extremely high thermal conductivity. It has great potential to improve the heat dissipation of β-Ga2O3 power devices. In this study, the conduction band offset between the BeO film and β-Ga2O3 substrate was found to be 3.4 eV, which was larger than those of conventional high-k gate dielectrics. In addition, the bandgap energies (8.6 eV and 4.7 eV for BeO and β-Ga2O3, respectively) were determined using reflection electron energy loss spectroscopy. The valence band offset (0.5 eV) was calculated using Kraut's method with the core level and valence band maximum energies of the BeO film and β-Ga2O3 substrate. The high conduction band offset provided by the ALD BeO dielectric on the β-Ga2O3 substrate lowered the gate leakage current density of a β-Ga2O3 power device.
|Journal||Journal of Alloys and Compounds|
|Publication status||Published - 2022 Nov 20|
Bibliographical noteFunding Information:
This work was supported by the Materials and Components Technology Development Program of MOTIE/KEIT [ 20012460 , Research support group for localization of ALD precursor and parts for 10 nm class semiconductor devices], and IBS ( R01–019-D1 ).
© 2022 Elsevier B.V.
All Science Journal Classification (ASJC) codes
- Mechanics of Materials
- Mechanical Engineering
- Metals and Alloys
- Materials Chemistry