Enhanced Light Stability of InGaZnO Thin-Film Transistors by Atomic-Layer-Deposited Y2O3 with Ozone

Hanearl Jung, Woo Hee Kim, Bo Eun Park, Whang Je Woo, Il Kwon Oh, Su Jeong Lee, Yun Cheol Kim, Jae Min Myoung, Satoko Gatineau, Christian Dussarrat, Hyungjun Kim

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Engineering & Materials Science

Chemistry