Enhanced piezoelectric and imprint characteristics of in situ sputtered Ta-doped Pb(Zr,Ti)O3 thin films on Ir/TiW/SiO2/Si substrates

Chan Su Han, Kyu Sik Park, Hong Je Choi, Yong Soo Cho

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science