To enhance the bias stability of amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs), we proposed a simple method to deposit the vertically graded-oxygen-vacancy active layer (VGA). The oxygen partial pressure was varied during deposition in order to fabricate VGA TFTs using sputtering. By adopting this method, we could control the concentration of oxygen vacancy in active layer according to the depth. The threshold voltage shift of optimized VGA TFTs was drastically improved under positive bias stress (PBS) condition compared with conventional ones.
|Number of pages||4|
|Journal||Digest of Technical Papers - SID International Symposium|
|Issue number||Book 3|
|Publication status||Published - 2015 Jun 1|
|Event||2015 SID International Symposium - San Jose, United States|
Duration: 2015 Jun 4 → …
Bibliographical noteFunding Information:
This work was supported by Samsung Display and the National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIP) (No. 2011-0028819)
© 2015 SID.
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