Abstract
We proposed the novel method for enhancement of a-IGZO oxide TFT performance by ultraviolet and thermal annealing (UVA) treatment and compared its properties to that of a conventional thermal annealing. Our UVA-Treated TFT had a higher field-effect mobility and positive bias-stress stability than those of conventional thermal annealing.
| Original language | English |
|---|---|
| Title of host publication | 20th International Display Workshops 2013, IDW 2013 |
| Publisher | International Display Workshops |
| Pages | 301-303 |
| Number of pages | 3 |
| Volume | 1 |
| ISBN (Electronic) | 9781510827783 |
| Publication status | Published - 2013 Jan 1 |
| Event | 20th International Display Workshops 2013, IDW 2013 - Sapporo, Japan Duration: 2013 Dec 3 → 2013 Dec 6 |
Other
| Other | 20th International Display Workshops 2013, IDW 2013 |
|---|---|
| Country | Japan |
| City | Sapporo |
| Period | 13/12/3 → 13/12/6 |
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All Science Journal Classification (ASJC) codes
- Computer Vision and Pattern Recognition
- Human-Computer Interaction
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Radiology Nuclear Medicine and imaging
Cite this
Ahn, B. D., Tak, Y. J., & Kim, H. J. (2013). Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing. In 20th International Display Workshops 2013, IDW 2013 (Vol. 1, pp. 301-303). International Display Workshops.