Abstract
We proposed the novel method for enhancement of a-IGZO oxide TFT performance by ultraviolet and thermal annealing (UVA) treatment and compared its properties to that of a conventional thermal annealing. Our UVA-Treated TFT had a higher field-effect mobility and positive bias-stress stability than those of conventional thermal annealing.
| Original language | English |
|---|---|
| Title of host publication | 20th International Display Workshops 2013, IDW 2013 |
| Publisher | International Display Workshops |
| Pages | 301-303 |
| Number of pages | 3 |
| Volume | 1 |
| ISBN (Electronic) | 9781510827783 |
| Publication status | Published - 2013 Jan 1 |
| Event | 20th International Display Workshops 2013, IDW 2013 - Sapporo, Japan Duration: 2013 Dec 3 → 2013 Dec 6 |
Other
| Other | 20th International Display Workshops 2013, IDW 2013 |
|---|---|
| Country | Japan |
| City | Sapporo |
| Period | 13/12/3 → 13/12/6 |
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All Science Journal Classification (ASJC) codes
- Computer Vision and Pattern Recognition
- Human-Computer Interaction
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Radiology Nuclear Medicine and imaging
Cite this
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Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing. / Ahn, Bvunq Du; Tak, Young Jun; Kim, Hyun Jae.
20th International Display Workshops 2013, IDW 2013. Vol. 1 International Display Workshops, 2013. p. 301-303.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing
AU - Ahn, Bvunq Du
AU - Tak, Young Jun
AU - Kim, Hyun Jae
PY - 2013/1/1
Y1 - 2013/1/1
N2 - We proposed the novel method for enhancement of a-IGZO oxide TFT performance by ultraviolet and thermal annealing (UVA) treatment and compared its properties to that of a conventional thermal annealing. Our UVA-Treated TFT had a higher field-effect mobility and positive bias-stress stability than those of conventional thermal annealing.
AB - We proposed the novel method for enhancement of a-IGZO oxide TFT performance by ultraviolet and thermal annealing (UVA) treatment and compared its properties to that of a conventional thermal annealing. Our UVA-Treated TFT had a higher field-effect mobility and positive bias-stress stability than those of conventional thermal annealing.
UR - http://www.scopus.com/inward/record.url?scp=85026236905&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85026236905&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85026236905
VL - 1
SP - 301
EP - 303
BT - 20th International Display Workshops 2013, IDW 2013
PB - International Display Workshops
ER -