Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing

Bvunq Du Ahn, Young Jun Tak, Hyun Jae Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We proposed the novel method for enhancement of a-IGZO oxide TFT performance by ultraviolet and thermal annealing (UVA) treatment and compared its properties to that of a conventional thermal annealing. Our UVA-Treated TFT had a higher field-effect mobility and positive bias-stress stability than those of conventional thermal annealing.

Original languageEnglish
Title of host publication20th International Display Workshops 2013, IDW 2013
PublisherInternational Display Workshops
Pages301-303
Number of pages3
Volume1
ISBN (Electronic)9781510827783
Publication statusPublished - 2013 Jan 1
Event20th International Display Workshops 2013, IDW 2013 - Sapporo, Japan
Duration: 2013 Dec 32013 Dec 6

Other

Other20th International Display Workshops 2013, IDW 2013
CountryJapan
CitySapporo
Period13/12/313/12/6

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All Science Journal Classification (ASJC) codes

  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Radiology Nuclear Medicine and imaging

Cite this

Ahn, B. D., Tak, Y. J., & Kim, H. J. (2013). Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing. In 20th International Display Workshops 2013, IDW 2013 (Vol. 1, pp. 301-303). International Display Workshops.