TY - GEN
T1 - Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing
AU - Ahn, Bvunq Du
AU - Tak, Young Jun
AU - Kim, Hyun Jae
N1 - Publisher Copyright:
© 2013 ITE and SID.
Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2013
Y1 - 2013
N2 - We proposed the novel method for enhancement of a-IGZO oxide TFT performance by ultraviolet and thermal annealing (UVA) treatment and compared its properties to that of a conventional thermal annealing. Our UVA-Treated TFT had a higher field-effect mobility and positive bias-stress stability than those of conventional thermal annealing.
AB - We proposed the novel method for enhancement of a-IGZO oxide TFT performance by ultraviolet and thermal annealing (UVA) treatment and compared its properties to that of a conventional thermal annealing. Our UVA-Treated TFT had a higher field-effect mobility and positive bias-stress stability than those of conventional thermal annealing.
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UR - http://www.scopus.com/inward/citedby.url?scp=85026236905&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85026236905
T3 - Proceedings of the International Display Workshops
SP - 301
EP - 303
BT - 20th International Display Workshops 2013, IDW 2013
PB - International Display Workshops
T2 - 20th International Display Workshops 2013, IDW 2013
Y2 - 3 December 2013 through 6 December 2013
ER -