Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing

Bvunq Du Ahn, Young Jun Tak, Hyun Jae Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We proposed the novel method for enhancement of a-IGZO oxide TFT performance by ultraviolet and thermal annealing (UVA) treatment and compared its properties to that of a conventional thermal annealing. Our UVA-Treated TFT had a higher field-effect mobility and positive bias-stress stability than those of conventional thermal annealing.

Original languageEnglish
Title of host publication20th International Display Workshops 2013, IDW 2013
PublisherInternational Display Workshops
Pages301-303
Number of pages3
Volume1
ISBN (Electronic)9781510827783
Publication statusPublished - 2013 Jan 1
Event20th International Display Workshops 2013, IDW 2013 - Sapporo, Japan
Duration: 2013 Dec 32013 Dec 6

Other

Other20th International Display Workshops 2013, IDW 2013
CountryJapan
CitySapporo
Period13/12/313/12/6

Fingerprint

Oxides
Hot Temperature
Annealing

All Science Journal Classification (ASJC) codes

  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Radiology Nuclear Medicine and imaging

Cite this

Ahn, B. D., Tak, Y. J., & Kim, H. J. (2013). Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing. In 20th International Display Workshops 2013, IDW 2013 (Vol. 1, pp. 301-303). International Display Workshops.
Ahn, Bvunq Du ; Tak, Young Jun ; Kim, Hyun Jae. / Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing. 20th International Display Workshops 2013, IDW 2013. Vol. 1 International Display Workshops, 2013. pp. 301-303
@inproceedings{4d12d76c830c44d1ac917d8f7b02230f,
title = "Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing",
abstract = "We proposed the novel method for enhancement of a-IGZO oxide TFT performance by ultraviolet and thermal annealing (UVA) treatment and compared its properties to that of a conventional thermal annealing. Our UVA-Treated TFT had a higher field-effect mobility and positive bias-stress stability than those of conventional thermal annealing.",
author = "Ahn, {Bvunq Du} and Tak, {Young Jun} and Kim, {Hyun Jae}",
year = "2013",
month = "1",
day = "1",
language = "English",
volume = "1",
pages = "301--303",
booktitle = "20th International Display Workshops 2013, IDW 2013",
publisher = "International Display Workshops",

}

Ahn, BD, Tak, YJ & Kim, HJ 2013, Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing. in 20th International Display Workshops 2013, IDW 2013. vol. 1, International Display Workshops, pp. 301-303, 20th International Display Workshops 2013, IDW 2013, Sapporo, Japan, 13/12/3.

Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing. / Ahn, Bvunq Du; Tak, Young Jun; Kim, Hyun Jae.

20th International Display Workshops 2013, IDW 2013. Vol. 1 International Display Workshops, 2013. p. 301-303.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing

AU - Ahn, Bvunq Du

AU - Tak, Young Jun

AU - Kim, Hyun Jae

PY - 2013/1/1

Y1 - 2013/1/1

N2 - We proposed the novel method for enhancement of a-IGZO oxide TFT performance by ultraviolet and thermal annealing (UVA) treatment and compared its properties to that of a conventional thermal annealing. Our UVA-Treated TFT had a higher field-effect mobility and positive bias-stress stability than those of conventional thermal annealing.

AB - We proposed the novel method for enhancement of a-IGZO oxide TFT performance by ultraviolet and thermal annealing (UVA) treatment and compared its properties to that of a conventional thermal annealing. Our UVA-Treated TFT had a higher field-effect mobility and positive bias-stress stability than those of conventional thermal annealing.

UR - http://www.scopus.com/inward/record.url?scp=85026236905&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85026236905&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85026236905

VL - 1

SP - 301

EP - 303

BT - 20th International Display Workshops 2013, IDW 2013

PB - International Display Workshops

ER -

Ahn BD, Tak YJ, Kim HJ. Enhancement of a-IGZO oxide TFT performance by novel method including ultraviolet and thermal annealing. In 20th International Display Workshops 2013, IDW 2013. Vol. 1. International Display Workshops. 2013. p. 301-303