Epitaxial and polycrystalline Hf Nx (0.8≤x≤1.5) layers on MgO(001): Film growth and physical properties

H. S. Seo, T. Y. Lee, I. Petrov, J. E. Greene, D. Gall

Research output: Contribution to journal › Article › peer-review

84 Citations (Scopus)

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Physics & Astronomy