Epitaxial growth of si and sige using high-order silanes without a carrier gas at low temperatures via uhvcvd and lpcvd

Dae Seop Byeon, Choonghee Cho, Dongmin Yoon, Yongjoon Choi, Kiseok Lee, Seunghyun Baik, Dae Hong Ko

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2 Citations (Scopus)

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Chemistry

Material Science