In situ Auger electron spectroscopy (AES) spectra were obtained on single-crystal ScN(001) layers grown on MgO(001) 1 × 1 in a multichamber ultrahigh vacuum (UHV) system. A turbomolecular-pumped magnetron sputter deposition chamber was attached to a Physical Electronics model 660 scanning Auger system to allow spectra to be collected on the as-deposited film without exposure to air. The spectra show that the film surfaces are free of O and C. Spectra are also presented following sputter etching with a 3 keV Ar+ beam at an incident current density of 0.3 mA cm−2. The film was sputtered until the N/Sc peak height ratio reached equilibrium, then spectra were acquired for the after sputter condition. AES spectra were collected for both the as-deposited and the Ar+ sputter etched films using primary beam energies of 3, 5, 10, and 20 keV. The as-deposited bulk film composition was analyzed by Rutherford backscattering spectroscopy (RBS) and found to be stoichiometric with a N/Sc ratio of 1.06 ± 0.03.
|Number of pages||8|
|Journal||Surface Science Spectra|
|Publication status||Published - 2000 Jul 1|
Bibliographical noteFunding Information:
The authors gratefully acknowledge the financial support of the Department of Energy, under Contract No. DEFG02-96-ER45439 and the use of the facilities of the Center for Microanalysis of Materials, which is partially supported by DOE, at the University of Illinois.
© 2000 American Vacuum Society.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films