Evaluation of 3C-SiC nanomechanical resonators using room temperature magnetomotive transduction

Seong Chan Jun, X. M.Henry Huang, J. Hone, C. A. Zorman, M. Mehregany

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

We report our efforts toward using room temperature magnetomotive transduction technique for SiC nanomechanical resonators. The resonators were nanomachined from 30 nm-thick 3C-SiC thin films epitaxially grown on (100) silicon. The structures show mechanical resonance at 10.41 MHz with a quality factor of about 2800. Magnetomotive transduction was used to read out the resonance at room temperature and moderate pressure. This technique has the potential to become an important tool for studying the properties of ultrathin films, as well as developing deployable SiC-based NEMS prototype devices and systems for applications that would benefit from SiC as the structural material.

Original languageEnglish
Title of host publicationProceedings of the Fourth IEEE Conference on Sensors 2005
Pages1042-1045
Number of pages4
DOIs
Publication statusPublished - 2005
EventFourth IEEE Conference on Sensors 2005 - Irvine, CA, United States
Duration: 2005 Oct 312005 Nov 3

Publication series

NameProceedings of IEEE Sensors
Volume2005

Other

OtherFourth IEEE Conference on Sensors 2005
CountryUnited States
CityIrvine, CA
Period05/10/3105/11/3

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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