Abstract
A new evolutionary grinding process model has been developed for nanometric control of material removal from an aspheric surface of Zerodur substrate. The model incorporates novel control features such as i) a growing database; ii) an evolving, multi-variable regression equation; and iii) an adaptive correction factor for target surface roughness (Ra) for the next machine run. This process model demonstrated a unique evolutionary controllability of machining performance resulting in the final grinding accuracy (i.e. averaged difference between target and measured surface roughness) of -0.2±2.3(σ) nm Ra over seven trial machine runs for the target surface roughness ranging from 115 nm to 64 nm Ra.
Original language | English |
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Pages (from-to) | 3786-3797 |
Number of pages | 12 |
Journal | Optics Express |
Volume | 16 |
Issue number | 6 |
DOIs | |
Publication status | Published - 2008 Mar 17 |
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics