Evolutionary grinding model for nanometric control of surface roughness for aspheric optical surfaces

Jeong Yeol Han, Sug Whan Kim, Inwoo Han, Geon Hee Kim

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A new evolutionary grinding process model has been developed for nanometric control of material removal from an aspheric surface of Zerodur substrate. The model incorporates novel control features such as i) a growing database; ii) an evolving, multi-variable regression equation; and iii) an adaptive correction factor for target surface roughness (Ra) for the next machine run. This process model demonstrated a unique evolutionary controllability of machining performance resulting in the final grinding accuracy (i.e. averaged difference between target and measured surface roughness) of -0.2±2.3(σ) nm Ra over seven trial machine runs for the target surface roughness ranging from 115 nm to 64 nm Ra.

Original languageEnglish
Pages (from-to)3786-3797
Number of pages12
JournalOptics Express
Volume16
Issue number6
DOIs
Publication statusPublished - 2008 Mar 17

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grinding
surface roughness
machining
controllability
regression analysis

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

Cite this

Han, Jeong Yeol ; Kim, Sug Whan ; Han, Inwoo ; Kim, Geon Hee. / Evolutionary grinding model for nanometric control of surface roughness for aspheric optical surfaces. In: Optics Express. 2008 ; Vol. 16, No. 6. pp. 3786-3797.
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Evolutionary grinding model for nanometric control of surface roughness for aspheric optical surfaces. / Han, Jeong Yeol; Kim, Sug Whan; Han, Inwoo; Kim, Geon Hee.

In: Optics Express, Vol. 16, No. 6, 17.03.2008, p. 3786-3797.

Research output: Contribution to journalArticle

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