Evolutionary grinding model for nanometric control of surface roughness for aspheric optical surfaces

Jeong Yeol Han, Sug Whan Kim, Inwoo Han, Geon Hee Kim

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A new evolutionary grinding process model has been developed for nanometric control of material removal from an aspheric surface of Zerodur substrate. The model incorporates novel control features such as i) a growing database; ii) an evolving, multi-variable regression equation; and iii) an adaptive correction factor for target surface roughness (Ra) for the next machine run. This process model demonstrated a unique evolutionary controllability of machining performance resulting in the final grinding accuracy (i.e. averaged difference between target and measured surface roughness) of -0.2±2.3(σ) nm Ra over seven trial machine runs for the target surface roughness ranging from 115 nm to 64 nm Ra.

Original languageEnglish
Pages (from-to)3786-3797
Number of pages12
JournalOptics Express
Volume16
Issue number6
DOIs
Publication statusPublished - 2008 Mar 17

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

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