Abstract
A new evolutionary grinding process model has been developed for nanometric control of material removal from an aspheric surface of Zerodur substrate. The model incorporates novel control features such as i) a growing database; ii) an evolving, multi-variable regression equation; and iii) an adaptive correction factor for target surface roughness (Ra) for the next machine run. This process model demonstrated a unique evolutionary controllability of machining performance resulting in the final grinding accuracy (i.e. averaged difference between target and measured surface roughness) of -0.2±2.3(σ) nm Ra over seven trial machine runs for the target surface roughness ranging from 115 nm to 64 nm Ra.
| Original language | English |
|---|---|
| Pages (from-to) | 3786-3797 |
| Number of pages | 12 |
| Journal | Optics Express |
| Volume | 16 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 2008 Mar 17 |
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All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics
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Evolutionary grinding model for nanometric control of surface roughness for aspheric optical surfaces. / Han, Jeong Yeol; Kim, Sug Whan; Han, Inwoo; Kim, Geon Hee.
In: Optics Express, Vol. 16, No. 6, 17.03.2008, p. 3786-3797.Research output: Contribution to journal › Article
TY - JOUR
T1 - Evolutionary grinding model for nanometric control of surface roughness for aspheric optical surfaces
AU - Han, Jeong Yeol
AU - Kim, Sug Whan
AU - Han, Inwoo
AU - Kim, Geon Hee
PY - 2008/3/17
Y1 - 2008/3/17
N2 - A new evolutionary grinding process model has been developed for nanometric control of material removal from an aspheric surface of Zerodur substrate. The model incorporates novel control features such as i) a growing database; ii) an evolving, multi-variable regression equation; and iii) an adaptive correction factor for target surface roughness (Ra) for the next machine run. This process model demonstrated a unique evolutionary controllability of machining performance resulting in the final grinding accuracy (i.e. averaged difference between target and measured surface roughness) of -0.2±2.3(σ) nm Ra over seven trial machine runs for the target surface roughness ranging from 115 nm to 64 nm Ra.
AB - A new evolutionary grinding process model has been developed for nanometric control of material removal from an aspheric surface of Zerodur substrate. The model incorporates novel control features such as i) a growing database; ii) an evolving, multi-variable regression equation; and iii) an adaptive correction factor for target surface roughness (Ra) for the next machine run. This process model demonstrated a unique evolutionary controllability of machining performance resulting in the final grinding accuracy (i.e. averaged difference between target and measured surface roughness) of -0.2±2.3(σ) nm Ra over seven trial machine runs for the target surface roughness ranging from 115 nm to 64 nm Ra.
UR - http://www.scopus.com/inward/record.url?scp=41149176211&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=41149176211&partnerID=8YFLogxK
U2 - 10.1364/OE.16.003786
DO - 10.1364/OE.16.003786
M3 - Article
C2 - 18542474
AN - SCOPUS:41149176211
VL - 16
SP - 3786
EP - 3797
JO - Optics Express
JF - Optics Express
SN - 1094-4087
IS - 6
ER -