Experimental and numerical study of electrochemical nanomachining using an AFM cantilever tip

Gyudo Lee, Huihun Jung, Jongsang Son, Kihwan Nam, Taeyun Kwon, Geunbae Lim, Young Ho Kim, Jongbum Seo, Sang Woo Lee, Dae Sung Yoon

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

We fabricated nanopatterns on Cu thin films via an electrochemical route using an atomic force microscope(AFM). Experimental results were compared with an equivalent electrochemical circuit model representing an electrochemical nanomachining(ECN) technique. In order to precisely construct the nanopatterns, an ultra-short pulse was applied onto the Cu film through the AFM cantilever tip. The line width of the nanopatterns (the lateral dimension) increased with increased pulse amplitude, on-time, and frequency. The tip velocity effect on the nanopattern line width was also investigated. The study described here provides important insight for fabricating nanopatterns precisely using electrochemical methods with an AFM cantilever tip.

Original languageEnglish
Article number185301
JournalNanotechnology
Volume21
Issue number18
DOIs
Publication statusPublished - 2010 Apr 21

Fingerprint

Microscopes
Linewidth
Ultrashort pulses
Thin films
Networks (circuits)

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Lee, G., Jung, H., Son, J., Nam, K., Kwon, T., Lim, G., ... Yoon, D. S. (2010). Experimental and numerical study of electrochemical nanomachining using an AFM cantilever tip. Nanotechnology, 21(18), [185301]. https://doi.org/10.1088/0957-4484/21/18/185301
Lee, Gyudo ; Jung, Huihun ; Son, Jongsang ; Nam, Kihwan ; Kwon, Taeyun ; Lim, Geunbae ; Kim, Young Ho ; Seo, Jongbum ; Lee, Sang Woo ; Yoon, Dae Sung. / Experimental and numerical study of electrochemical nanomachining using an AFM cantilever tip. In: Nanotechnology. 2010 ; Vol. 21, No. 18.
@article{5374fc83a7f54e00b5def49502f86392,
title = "Experimental and numerical study of electrochemical nanomachining using an AFM cantilever tip",
abstract = "We fabricated nanopatterns on Cu thin films via an electrochemical route using an atomic force microscope(AFM). Experimental results were compared with an equivalent electrochemical circuit model representing an electrochemical nanomachining(ECN) technique. In order to precisely construct the nanopatterns, an ultra-short pulse was applied onto the Cu film through the AFM cantilever tip. The line width of the nanopatterns (the lateral dimension) increased with increased pulse amplitude, on-time, and frequency. The tip velocity effect on the nanopattern line width was also investigated. The study described here provides important insight for fabricating nanopatterns precisely using electrochemical methods with an AFM cantilever tip.",
author = "Gyudo Lee and Huihun Jung and Jongsang Son and Kihwan Nam and Taeyun Kwon and Geunbae Lim and Kim, {Young Ho} and Jongbum Seo and Lee, {Sang Woo} and Yoon, {Dae Sung}",
year = "2010",
month = "4",
day = "21",
doi = "10.1088/0957-4484/21/18/185301",
language = "English",
volume = "21",
journal = "Nanotechnology",
issn = "0957-4484",
publisher = "IOP Publishing Ltd.",
number = "18",

}

Lee, G, Jung, H, Son, J, Nam, K, Kwon, T, Lim, G, Kim, YH, Seo, J, Lee, SW & Yoon, DS 2010, 'Experimental and numerical study of electrochemical nanomachining using an AFM cantilever tip', Nanotechnology, vol. 21, no. 18, 185301. https://doi.org/10.1088/0957-4484/21/18/185301

Experimental and numerical study of electrochemical nanomachining using an AFM cantilever tip. / Lee, Gyudo; Jung, Huihun; Son, Jongsang; Nam, Kihwan; Kwon, Taeyun; Lim, Geunbae; Kim, Young Ho; Seo, Jongbum; Lee, Sang Woo; Yoon, Dae Sung.

In: Nanotechnology, Vol. 21, No. 18, 185301, 21.04.2010.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Experimental and numerical study of electrochemical nanomachining using an AFM cantilever tip

AU - Lee, Gyudo

AU - Jung, Huihun

AU - Son, Jongsang

AU - Nam, Kihwan

AU - Kwon, Taeyun

AU - Lim, Geunbae

AU - Kim, Young Ho

AU - Seo, Jongbum

AU - Lee, Sang Woo

AU - Yoon, Dae Sung

PY - 2010/4/21

Y1 - 2010/4/21

N2 - We fabricated nanopatterns on Cu thin films via an electrochemical route using an atomic force microscope(AFM). Experimental results were compared with an equivalent electrochemical circuit model representing an electrochemical nanomachining(ECN) technique. In order to precisely construct the nanopatterns, an ultra-short pulse was applied onto the Cu film through the AFM cantilever tip. The line width of the nanopatterns (the lateral dimension) increased with increased pulse amplitude, on-time, and frequency. The tip velocity effect on the nanopattern line width was also investigated. The study described here provides important insight for fabricating nanopatterns precisely using electrochemical methods with an AFM cantilever tip.

AB - We fabricated nanopatterns on Cu thin films via an electrochemical route using an atomic force microscope(AFM). Experimental results were compared with an equivalent electrochemical circuit model representing an electrochemical nanomachining(ECN) technique. In order to precisely construct the nanopatterns, an ultra-short pulse was applied onto the Cu film through the AFM cantilever tip. The line width of the nanopatterns (the lateral dimension) increased with increased pulse amplitude, on-time, and frequency. The tip velocity effect on the nanopattern line width was also investigated. The study described here provides important insight for fabricating nanopatterns precisely using electrochemical methods with an AFM cantilever tip.

UR - http://www.scopus.com/inward/record.url?scp=77950925372&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77950925372&partnerID=8YFLogxK

U2 - 10.1088/0957-4484/21/18/185301

DO - 10.1088/0957-4484/21/18/185301

M3 - Article

VL - 21

JO - Nanotechnology

JF - Nanotechnology

SN - 0957-4484

IS - 18

M1 - 185301

ER -