Experimental study on input and bottleneck scheduling for a semiconductor fabrication line

Young Hoon Lee, Jongkwan Park, Sooyoung Kim

Research output: Contribution to journalArticle

Abstract

In semiconductor manufacturing, the key production criteria are a short cycle time and the maximization of the production capacity. It is known that the production capacity mainly depends on the bottleneck machines in the photolithography processes used in the fabrication process. In this paper we suggest a model to allow the testing of various policies without losing the main characteristics of the fabrication line. Efficient scheduling rules for the bottlenecks and input rules are also suggested with the objectives of maximizing the production volume under a short cycle time. We have shown that pull type scheduling rules outperform push type rules for most performance measures, and that there exists a good combination of scheduling and input rules. Experimental results also include the relationships among the cycle time, balance rate, production output and delivery performance.

Original languageEnglish
Pages (from-to)179-190
Number of pages12
JournalIIE Transactions (Institute of Industrial Engineers)
Volume34
Issue number2
DOIs
Publication statusPublished - 2002 Jan 1

Fingerprint

Scheduling
Semiconductor materials
Fabrication
Photolithography
Testing

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering

Cite this

@article{d51e6c7a799d48e3a6cf4e9f81655aca,
title = "Experimental study on input and bottleneck scheduling for a semiconductor fabrication line",
abstract = "In semiconductor manufacturing, the key production criteria are a short cycle time and the maximization of the production capacity. It is known that the production capacity mainly depends on the bottleneck machines in the photolithography processes used in the fabrication process. In this paper we suggest a model to allow the testing of various policies without losing the main characteristics of the fabrication line. Efficient scheduling rules for the bottlenecks and input rules are also suggested with the objectives of maximizing the production volume under a short cycle time. We have shown that pull type scheduling rules outperform push type rules for most performance measures, and that there exists a good combination of scheduling and input rules. Experimental results also include the relationships among the cycle time, balance rate, production output and delivery performance.",
author = "Lee, {Young Hoon} and Jongkwan Park and Sooyoung Kim",
year = "2002",
month = "1",
day = "1",
doi = "10.1023/A:1011948031373",
language = "English",
volume = "34",
pages = "179--190",
journal = "IISE Transactions",
issn = "2472-5854",
publisher = "Taylor and Francis Ltd.",
number = "2",

}

Experimental study on input and bottleneck scheduling for a semiconductor fabrication line. / Lee, Young Hoon; Park, Jongkwan; Kim, Sooyoung.

In: IIE Transactions (Institute of Industrial Engineers), Vol. 34, No. 2, 01.01.2002, p. 179-190.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Experimental study on input and bottleneck scheduling for a semiconductor fabrication line

AU - Lee, Young Hoon

AU - Park, Jongkwan

AU - Kim, Sooyoung

PY - 2002/1/1

Y1 - 2002/1/1

N2 - In semiconductor manufacturing, the key production criteria are a short cycle time and the maximization of the production capacity. It is known that the production capacity mainly depends on the bottleneck machines in the photolithography processes used in the fabrication process. In this paper we suggest a model to allow the testing of various policies without losing the main characteristics of the fabrication line. Efficient scheduling rules for the bottlenecks and input rules are also suggested with the objectives of maximizing the production volume under a short cycle time. We have shown that pull type scheduling rules outperform push type rules for most performance measures, and that there exists a good combination of scheduling and input rules. Experimental results also include the relationships among the cycle time, balance rate, production output and delivery performance.

AB - In semiconductor manufacturing, the key production criteria are a short cycle time and the maximization of the production capacity. It is known that the production capacity mainly depends on the bottleneck machines in the photolithography processes used in the fabrication process. In this paper we suggest a model to allow the testing of various policies without losing the main characteristics of the fabrication line. Efficient scheduling rules for the bottlenecks and input rules are also suggested with the objectives of maximizing the production volume under a short cycle time. We have shown that pull type scheduling rules outperform push type rules for most performance measures, and that there exists a good combination of scheduling and input rules. Experimental results also include the relationships among the cycle time, balance rate, production output and delivery performance.

UR - http://www.scopus.com/inward/record.url?scp=85017253739&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85017253739&partnerID=8YFLogxK

U2 - 10.1023/A:1011948031373

DO - 10.1023/A:1011948031373

M3 - Article

VL - 34

SP - 179

EP - 190

JO - IISE Transactions

JF - IISE Transactions

SN - 2472-5854

IS - 2

ER -