Abstract
High-resolution, conformable phase masks provide a means to fabricate, in an experimentally simple manner, classes of 3D nanostructures that are technologically important but difficult to generate in other ways. In this approach, light passing through a phase mask that has features of relief comparable in dimension to the wavelength generates a 3D distribution of intensity that exposes a photopolymer film throughout its thickness. Developing this polymer yields a structure in the geometry of the intensity distribution, with feature sizes as small as 50 nm. Rigorous coupled-wave analysis reveals the fundamental aspects of the optics associated with this method; a broad-range 3D nanostructures patterned with it demonstrates its technical capabilities. A nanoporous filter element built inside a microfluidic channel represents one example of the many types of functional devices that can be constructed.
| Original language | English |
|---|---|
| Pages (from-to) | 12428-12433 |
| Number of pages | 6 |
| Journal | Proceedings of the National Academy of Sciences of the United States of America |
| Volume | 101 |
| Issue number | 34 |
| DOIs | |
| Publication status | Published - 2004 Aug 24 |
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All Science Journal Classification (ASJC) codes
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Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks. / Jeon, Seokwoo; Park, Jang Ung; Cirelli, Ray; Yang, Shu; Heitzman, Carla E.; Braun, Paul V.; Kenis, Paul J.A.; Rogers, John A.
In: Proceedings of the National Academy of Sciences of the United States of America, Vol. 101, No. 34, 24.08.2004, p. 12428-12433.Research output: Contribution to journal › Article
TY - JOUR
T1 - Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks
AU - Jeon, Seokwoo
AU - Park, Jang Ung
AU - Cirelli, Ray
AU - Yang, Shu
AU - Heitzman, Carla E.
AU - Braun, Paul V.
AU - Kenis, Paul J.A.
AU - Rogers, John A.
PY - 2004/8/24
Y1 - 2004/8/24
N2 - High-resolution, conformable phase masks provide a means to fabricate, in an experimentally simple manner, classes of 3D nanostructures that are technologically important but difficult to generate in other ways. In this approach, light passing through a phase mask that has features of relief comparable in dimension to the wavelength generates a 3D distribution of intensity that exposes a photopolymer film throughout its thickness. Developing this polymer yields a structure in the geometry of the intensity distribution, with feature sizes as small as 50 nm. Rigorous coupled-wave analysis reveals the fundamental aspects of the optics associated with this method; a broad-range 3D nanostructures patterned with it demonstrates its technical capabilities. A nanoporous filter element built inside a microfluidic channel represents one example of the many types of functional devices that can be constructed.
AB - High-resolution, conformable phase masks provide a means to fabricate, in an experimentally simple manner, classes of 3D nanostructures that are technologically important but difficult to generate in other ways. In this approach, light passing through a phase mask that has features of relief comparable in dimension to the wavelength generates a 3D distribution of intensity that exposes a photopolymer film throughout its thickness. Developing this polymer yields a structure in the geometry of the intensity distribution, with feature sizes as small as 50 nm. Rigorous coupled-wave analysis reveals the fundamental aspects of the optics associated with this method; a broad-range 3D nanostructures patterned with it demonstrates its technical capabilities. A nanoporous filter element built inside a microfluidic channel represents one example of the many types of functional devices that can be constructed.
UR - http://www.scopus.com/inward/record.url?scp=4344674672&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=4344674672&partnerID=8YFLogxK
U2 - 10.1073/pnas.0403048101
DO - 10.1073/pnas.0403048101
M3 - Article
C2 - 15314211
AN - SCOPUS:4344674672
VL - 101
SP - 12428
EP - 12433
JO - Proceedings of the National Academy of Sciences of the United States of America
JF - Proceedings of the National Academy of Sciences of the United States of America
SN - 0027-8424
IS - 34
ER -