Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks

Seokwoo Jeon, Jang Ung Park, Ray Cirelli, Shu Yang, Carla E. Heitzman, Paul V. Braun, Paul J.A. Kenis, John A. Rogers

Research output: Contribution to journalArticle

227 Citations (Scopus)

Abstract

High-resolution, conformable phase masks provide a means to fabricate, in an experimentally simple manner, classes of 3D nanostructures that are technologically important but difficult to generate in other ways. In this approach, light passing through a phase mask that has features of relief comparable in dimension to the wavelength generates a 3D distribution of intensity that exposes a photopolymer film throughout its thickness. Developing this polymer yields a structure in the geometry of the intensity distribution, with feature sizes as small as 50 nm. Rigorous coupled-wave analysis reveals the fundamental aspects of the optics associated with this method; a broad-range 3D nanostructures patterned with it demonstrates its technical capabilities. A nanoporous filter element built inside a microfluidic channel represents one example of the many types of functional devices that can be constructed.

Original languageEnglish
Pages (from-to)12428-12433
Number of pages6
JournalProceedings of the National Academy of Sciences of the United States of America
Volume101
Issue number34
DOIs
Publication statusPublished - 2004 Aug 24

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Nanostructures
Masks
Microfluidics
Polymers
Light
Equipment and Supplies

All Science Journal Classification (ASJC) codes

  • General

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Jeon, Seokwoo ; Park, Jang Ung ; Cirelli, Ray ; Yang, Shu ; Heitzman, Carla E. ; Braun, Paul V. ; Kenis, Paul J.A. ; Rogers, John A. / Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks. In: Proceedings of the National Academy of Sciences of the United States of America. 2004 ; Vol. 101, No. 34. pp. 12428-12433.
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Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks. / Jeon, Seokwoo; Park, Jang Ung; Cirelli, Ray; Yang, Shu; Heitzman, Carla E.; Braun, Paul V.; Kenis, Paul J.A.; Rogers, John A.

In: Proceedings of the National Academy of Sciences of the United States of America, Vol. 101, No. 34, 24.08.2004, p. 12428-12433.

Research output: Contribution to journalArticle

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