Fabrication and characterization of a nanowire/polymer-based nanocomposite for a prototype thermoelectric device

Alexis R. Abramson, Woochul Kim, Scott T. Huxtable, Haoquan Yan, Yiying Wu, Arun Majumdar, Chang Lin Tien, Peidong Yang

Research output: Contribution to journalArticle

124 Citations (Scopus)

Abstract

This paper discusses the design, fabrication and testing of a novel thermoelectric device comprised of arrays of silicon nanowires embedded in a polymer matrix. By exploiting the low-thermal conductivity of the composite and presumably high-power factor of the nanowires, a thermoelectric figure of merit, higher than the corresponding bulk value, should result. Arrays were first synthesized using a vapor-liquid-solid (VLS) process leading to one-dimensional (1-D) growth of single-crystalline nanowires. To provide structural support while maintaining thermal isolation between nanowires, parylene, a low thermal conductivity and extremely conformal polymer, was embedded within the arrays. Mechanical polishing and oxygen plasma etching techniques were used to expose the nanowire tips and a metal contact was deposited on the top surface. Scanning electron micrographs (SEMs) illustrate the results of the fabrication processes. Using a modification of the 3ω technique, the effective thermal conductivity of the nanowire matrix was measured and 1 V characteristics were also demonstrated. An assessment of the suitability of this nanocomposite for high thermoelectric performance devices is given.

Original languageEnglish
Pages (from-to)505-513
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume13
Issue number3
DOIs
Publication statusPublished - 2004 Jun 1

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Nanowires
Nanocomposites
Fabrication
Polymers
Thermal conductivity
Plasma etching
Polishing
Polymer matrix
Vapors
Crystalline materials
Scanning
Silicon
Oxygen
Electrons
Composite materials
Liquids
Testing
Metals

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Abramson, Alexis R. ; Kim, Woochul ; Huxtable, Scott T. ; Yan, Haoquan ; Wu, Yiying ; Majumdar, Arun ; Tien, Chang Lin ; Yang, Peidong. / Fabrication and characterization of a nanowire/polymer-based nanocomposite for a prototype thermoelectric device. In: Journal of Microelectromechanical Systems. 2004 ; Vol. 13, No. 3. pp. 505-513.
@article{cf9e825950d2480399635f48a230ccad,
title = "Fabrication and characterization of a nanowire/polymer-based nanocomposite for a prototype thermoelectric device",
abstract = "This paper discusses the design, fabrication and testing of a novel thermoelectric device comprised of arrays of silicon nanowires embedded in a polymer matrix. By exploiting the low-thermal conductivity of the composite and presumably high-power factor of the nanowires, a thermoelectric figure of merit, higher than the corresponding bulk value, should result. Arrays were first synthesized using a vapor-liquid-solid (VLS) process leading to one-dimensional (1-D) growth of single-crystalline nanowires. To provide structural support while maintaining thermal isolation between nanowires, parylene, a low thermal conductivity and extremely conformal polymer, was embedded within the arrays. Mechanical polishing and oxygen plasma etching techniques were used to expose the nanowire tips and a metal contact was deposited on the top surface. Scanning electron micrographs (SEMs) illustrate the results of the fabrication processes. Using a modification of the 3ω technique, the effective thermal conductivity of the nanowire matrix was measured and 1 V characteristics were also demonstrated. An assessment of the suitability of this nanocomposite for high thermoelectric performance devices is given.",
author = "Abramson, {Alexis R.} and Woochul Kim and Huxtable, {Scott T.} and Haoquan Yan and Yiying Wu and Arun Majumdar and Tien, {Chang Lin} and Peidong Yang",
year = "2004",
month = "6",
day = "1",
doi = "10.1109/JMEMS.2004.828742",
language = "English",
volume = "13",
pages = "505--513",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "3",

}

Fabrication and characterization of a nanowire/polymer-based nanocomposite for a prototype thermoelectric device. / Abramson, Alexis R.; Kim, Woochul; Huxtable, Scott T.; Yan, Haoquan; Wu, Yiying; Majumdar, Arun; Tien, Chang Lin; Yang, Peidong.

In: Journal of Microelectromechanical Systems, Vol. 13, No. 3, 01.06.2004, p. 505-513.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Fabrication and characterization of a nanowire/polymer-based nanocomposite for a prototype thermoelectric device

AU - Abramson, Alexis R.

AU - Kim, Woochul

AU - Huxtable, Scott T.

AU - Yan, Haoquan

AU - Wu, Yiying

AU - Majumdar, Arun

AU - Tien, Chang Lin

AU - Yang, Peidong

PY - 2004/6/1

Y1 - 2004/6/1

N2 - This paper discusses the design, fabrication and testing of a novel thermoelectric device comprised of arrays of silicon nanowires embedded in a polymer matrix. By exploiting the low-thermal conductivity of the composite and presumably high-power factor of the nanowires, a thermoelectric figure of merit, higher than the corresponding bulk value, should result. Arrays were first synthesized using a vapor-liquid-solid (VLS) process leading to one-dimensional (1-D) growth of single-crystalline nanowires. To provide structural support while maintaining thermal isolation between nanowires, parylene, a low thermal conductivity and extremely conformal polymer, was embedded within the arrays. Mechanical polishing and oxygen plasma etching techniques were used to expose the nanowire tips and a metal contact was deposited on the top surface. Scanning electron micrographs (SEMs) illustrate the results of the fabrication processes. Using a modification of the 3ω technique, the effective thermal conductivity of the nanowire matrix was measured and 1 V characteristics were also demonstrated. An assessment of the suitability of this nanocomposite for high thermoelectric performance devices is given.

AB - This paper discusses the design, fabrication and testing of a novel thermoelectric device comprised of arrays of silicon nanowires embedded in a polymer matrix. By exploiting the low-thermal conductivity of the composite and presumably high-power factor of the nanowires, a thermoelectric figure of merit, higher than the corresponding bulk value, should result. Arrays were first synthesized using a vapor-liquid-solid (VLS) process leading to one-dimensional (1-D) growth of single-crystalline nanowires. To provide structural support while maintaining thermal isolation between nanowires, parylene, a low thermal conductivity and extremely conformal polymer, was embedded within the arrays. Mechanical polishing and oxygen plasma etching techniques were used to expose the nanowire tips and a metal contact was deposited on the top surface. Scanning electron micrographs (SEMs) illustrate the results of the fabrication processes. Using a modification of the 3ω technique, the effective thermal conductivity of the nanowire matrix was measured and 1 V characteristics were also demonstrated. An assessment of the suitability of this nanocomposite for high thermoelectric performance devices is given.

UR - http://www.scopus.com/inward/record.url?scp=3142705038&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=3142705038&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2004.828742

DO - 10.1109/JMEMS.2004.828742

M3 - Article

AN - SCOPUS:3142705038

VL - 13

SP - 505

EP - 513

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 3

ER -