Abstract
We report piezoresistive high-g three-axis accelerometer with a single proof mass suspended by thin eight beams. This eight-beam design allows load-sharing at high-g preventing structural breakage, as well as the symmetric arrangement of piezoresistors. The device chip size is 1.4 mm × 1.4 mm × 0.51 mm. Experimental results show that the sensitivity in X-, Y- and Z-axes are 0.2433, 0.1308 and 0.3068 mV/g/V under 5 V applied and the resolutions are 24.2, 29.9 and 25.4 g, respectively.
| Original language | English |
|---|---|
| Article number | 7 |
| Journal | Micro and Nano Systems Letters |
| Volume | 5 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2017 Dec 1 |
All Science Journal Classification (ASJC) codes
- Biomaterials
- Biomedical Engineering
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Jung, H. I., Kwon, D. S., & Kim, J. (2017). Fabrication and characterization of monolithic piezoresistive high-g three-axis accelerometer. Micro and Nano Systems Letters, 5(1), [7]. https://doi.org/10.1186/s40486-016-0041-7