Fabrication and characterization of monolithic piezoresistive high-g three-axis accelerometer

Han Il Jung, Dae Sung Kwon, Jongbaeg Kim

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)


We report piezoresistive high-g three-axis accelerometer with a single proof mass suspended by thin eight beams. This eight-beam design allows load-sharing at high-g preventing structural breakage, as well as the symmetric arrangement of piezoresistors. The device chip size is 1.4 mm × 1.4 mm × 0.51 mm. Experimental results show that the sensitivity in X-, Y- and Z-axes are 0.2433, 0.1308 and 0.3068 mV/g/V under 5 V applied and the resolutions are 24.2, 29.9 and 25.4 g, respectively.

Original languageEnglish
Article number7
JournalMicro and Nano Systems Letters
Issue number1
Publication statusPublished - 2017 Dec 1

Bibliographical note

Funding Information:
This work was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT and future Planning (NRF‑2015R1A2A1A01005496) and LG Electronics.

Publisher Copyright:
© 2017, The Author(s).

All Science Journal Classification (ASJC) codes

  • Biomaterials
  • Biomedical Engineering


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