Fabrication and characterization of monolithic piezoresistive high-g three-axis accelerometer

Han Il Jung, Dae Sung Kwon, Jongbaeg Kim

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

We report piezoresistive high-g three-axis accelerometer with a single proof mass suspended by thin eight beams. This eight-beam design allows load-sharing at high-g preventing structural breakage, as well as the symmetric arrangement of piezoresistors. The device chip size is 1.4 mm × 1.4 mm × 0.51 mm. Experimental results show that the sensitivity in X-, Y- and Z-axes are 0.2433, 0.1308 and 0.3068 mV/g/V under 5 V applied and the resolutions are 24.2, 29.9 and 25.4 g, respectively.

Original languageEnglish
Article number7
JournalMicro and Nano Systems Letters
Volume5
Issue number1
DOIs
Publication statusPublished - 2017 Dec 1

All Science Journal Classification (ASJC) codes

  • Biomaterials
  • Biomedical Engineering

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