Fabrication and characterization of self- and artificially-assembled ZnO nanodots

Sang Woo Kim; Masaya Ueda; Shigeo Fujita; Shizuo Fujita

Fabrication and characterization of self- and artificially-assembled ZnO nanodots

Sang Woo Kim, Masaya Ueda, Shigeo Fujita, Shizuo Fujita

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

Self-assembled ZnO nanodots on SiO₂/Si with low-dimensional quantum characteristics were realized by metalorganic chemical vapor deposition (MOCVD). Transmission electron microscope results showed that the self-assembled ZnO nanodots on the SiO₂/Si substrates have a single crystal structure without any kinds of defects. In order to control the fabrication of functionalized ZnO nanodots (e.g., with controlled morphology and dimension) artificially we introduced a combination of "bottom-up" "top-down" approach based on the MOCVD deposition on functionalized substrates prepared by focused ion beam (FIB). Highly ordered two-dimensional ZnO-nanodot arrays with a 750-nm or 190-nm periodicity on SiO₂/Si substrates were fabricated in this study. Free exciton emission from a position-controlled single ZnO nanodot at room temperature was clearly observed in CL measurements.

Original language	English
Pages (from-to)	S803-S807
Journal	Journal of the Korean Physical Society
Volume	45
Issue number	SUPPL.
Publication status	Published - 2004 Dec

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

Cite this

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abstract = "Self-assembled ZnO nanodots on SiO2/Si with low-dimensional quantum characteristics were realized by metalorganic chemical vapor deposition (MOCVD). Transmission electron microscope results showed that the self-assembled ZnO nanodots on the SiO2/Si substrates have a single crystal structure without any kinds of defects. In order to control the fabrication of functionalized ZnO nanodots (e.g., with controlled morphology and dimension) artificially we introduced a combination of {"}bottom-up{"} {"}top-down{"} approach based on the MOCVD deposition on functionalized substrates prepared by focused ion beam (FIB). Highly ordered two-dimensional ZnO-nanodot arrays with a 750-nm or 190-nm periodicity on SiO2/Si substrates were fabricated in this study. Free exciton emission from a position-controlled single ZnO nanodot at room temperature was clearly observed in CL measurements.",

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AU - Ueda, Masaya

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AU - Fujita, Shizuo

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Y1 - 2004/12

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AB - Self-assembled ZnO nanodots on SiO2/Si with low-dimensional quantum characteristics were realized by metalorganic chemical vapor deposition (MOCVD). Transmission electron microscope results showed that the self-assembled ZnO nanodots on the SiO2/Si substrates have a single crystal structure without any kinds of defects. In order to control the fabrication of functionalized ZnO nanodots (e.g., with controlled morphology and dimension) artificially we introduced a combination of "bottom-up" "top-down" approach based on the MOCVD deposition on functionalized substrates prepared by focused ion beam (FIB). Highly ordered two-dimensional ZnO-nanodot arrays with a 750-nm or 190-nm periodicity on SiO2/Si substrates were fabricated in this study. Free exciton emission from a position-controlled single ZnO nanodot at room temperature was clearly observed in CL measurements.

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Fabrication and characterization of self- and artificially-assembled ZnO nanodots

Abstract

All Science Journal Classification (ASJC) codes

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