Fabrication and characterization of self- and artificially-assembled ZnO nanodots

Sang Woo Kim, Masaya Ueda, Shigeo Fujita, Shizuo Fujita

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Self-assembled ZnO nanodots on SiO2/Si with low-dimensional quantum characteristics were realized by metalorganic chemical vapor deposition (MOCVD). Transmission electron microscope results showed that the self-assembled ZnO nanodots on the SiO2/Si substrates have a single crystal structure without any kinds of defects. In order to control the fabrication of functionalized ZnO nanodots (e.g., with controlled morphology and dimension) artificially we introduced a combination of "bottom-up" "top-down" approach based on the MOCVD deposition on functionalized substrates prepared by focused ion beam (FIB). Highly ordered two-dimensional ZnO-nanodot arrays with a 750-nm or 190-nm periodicity on SiO2/Si substrates were fabricated in this study. Free exciton emission from a position-controlled single ZnO nanodot at room temperature was clearly observed in CL measurements.

Original languageEnglish
Pages (from-to)S803-S807
JournalJournal of the Korean Physical Society
Issue numberSUPPL.
Publication statusPublished - 2004 Dec

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)


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