Fabrication and characterization of VOC sensor array based on SnO2 and ZnO nanoparticles functionalized by metalloporphyrins

Byeonghwa Cho, Kyounghoon Lee, Soonjae Pyo, Jongbaeg Kim

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16 Citations (Scopus)


A volatile organic compound (VOC) sensor array based on metal oxide nanoparticles (MOX NPs) functionalized by metalloporphyrins (MPPs) was demonstrated. The VOC sensor array was composed of four single sensors based on SnO2 NPs/cobalt-porphyrin, SnO2 NPs/zinc-porphyrin, SnO2 NPs/nickel-porphyrin and ZnO NPs/cobalt-porphyrin. The MOX NP/MPP-based sensors were fabricated by drop-casting the MOX NPs dispersion and MPPs solution onto a MEMS platform. The fabricated sensor successfully detected toluene at a concentration as low as 20 ppb, which is below the limit detection concentration of previously reported porphyrin-based VOC sensor arrays. We also confirmed the selectivity between benzene, toluene, ethylbenzene, and xylene (BTEX) by using principal component analysis in contrast to previous studies on MOX/MPP-based sensor. BTEX was classified from 1 to 9 ppm at a resolution of 2 ppm, and the sensor array showed stable performance even after considerable impact.

Original languageEnglish
Article number10
JournalMicro and Nano Systems Letters
Issue number1
Publication statusPublished - 2018 Dec 1

Bibliographical note

Funding Information:
This work was supported by the National Research Foundation of Korea (NRF) Grant funded by the Korea government (MSIT) (No. NRF-2018R1A2A1A05023070). This material is based upon work supported by the Ministry of Trade, Industry & Energy (MOTIE, Korea) under Industrial Technology Innovation Program. No. 10054548, ‘Development of Suspended Heterogeneous Nanostructure-based Hazardous Gas Microsensor System’.

Publisher Copyright:
© 2018, The Author(s).

All Science Journal Classification (ASJC) codes

  • Biomaterials
  • Biomedical Engineering


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