We report volatile organic compound (VOC) sensors based on suspended zinc oxide nanorods (ZnONRs) functionalized by cobalt porphyrin (CoPP) as sensing material. The ZnONRs are synthesized between two facing micro-bridges to form a two-terminal device. The ZnONRs are designed to be suspended well above the substrate for better exposure to and adsorption of VOC molecules to enhance sensitivity. Both of the two bridges serve as micro-heaters to increase the temperature of ZnONRs. Few studies have investigated the use of micro-heaters to heat these suspended nanostructures for gas sensing. In order to further improve the sensitivity, ZnONRs are functionalized by coating CoPP that excellently adsorbs VOC. The fabricated sensor successfully detected 8 ppb of toluene, one of representative VOCs. Benzene and xylene of 40 ppb were also able to be measured by the fabricated sensor.
|Title of host publication||TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||4|
|Publication status||Published - 2017 Jul 26|
|Event||19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China|
Duration: 2017 Jun 18 → 2017 Jun 22
|Name||TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems|
|Other||19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017|
|Country||Taiwan, Province of China|
|Period||17/6/18 → 17/6/22|
Bibliographical noteFunding Information:
This research was supported by Basic Science Research Program through the National Research Foundation of Korea(NRF) funded by the Ministry of Science, ICT and future Planning (NRF-2015R1A2A1A01005496) and the Technology Innovation Program funded By the Ministry of Trade, industry & Energy(MI, Korea) (10054548).
© 2017 IEEE.
All Science Journal Classification (ASJC) codes
- Chemical Health and Safety
- Electrical and Electronic Engineering