TY - GEN
T1 - Fabrication and characterization of VOC sensors based on suspended zinc oxide nanorods functionalized by cobalt porphyrin
AU - Lee, Kyounghoon
AU - Baek, Dae Hyun
AU - Kim, Jongbaeg
PY - 2017/7/26
Y1 - 2017/7/26
N2 - We report volatile organic compound (VOC) sensors based on suspended zinc oxide nanorods (ZnONRs) functionalized by cobalt porphyrin (CoPP) as sensing material. The ZnONRs are synthesized between two facing micro-bridges to form a two-terminal device. The ZnONRs are designed to be suspended well above the substrate for better exposure to and adsorption of VOC molecules to enhance sensitivity. Both of the two bridges serve as micro-heaters to increase the temperature of ZnONRs. Few studies have investigated the use of micro-heaters to heat these suspended nanostructures for gas sensing. In order to further improve the sensitivity, ZnONRs are functionalized by coating CoPP that excellently adsorbs VOC. The fabricated sensor successfully detected 8 ppb of toluene, one of representative VOCs. Benzene and xylene of 40 ppb were also able to be measured by the fabricated sensor.
AB - We report volatile organic compound (VOC) sensors based on suspended zinc oxide nanorods (ZnONRs) functionalized by cobalt porphyrin (CoPP) as sensing material. The ZnONRs are synthesized between two facing micro-bridges to form a two-terminal device. The ZnONRs are designed to be suspended well above the substrate for better exposure to and adsorption of VOC molecules to enhance sensitivity. Both of the two bridges serve as micro-heaters to increase the temperature of ZnONRs. Few studies have investigated the use of micro-heaters to heat these suspended nanostructures for gas sensing. In order to further improve the sensitivity, ZnONRs are functionalized by coating CoPP that excellently adsorbs VOC. The fabricated sensor successfully detected 8 ppb of toluene, one of representative VOCs. Benzene and xylene of 40 ppb were also able to be measured by the fabricated sensor.
UR - http://www.scopus.com/inward/record.url?scp=85029363628&partnerID=8YFLogxK
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U2 - 10.1109/TRANSDUCERS.2017.7994050
DO - 10.1109/TRANSDUCERS.2017.7994050
M3 - Conference contribution
AN - SCOPUS:85029363628
T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 307
EP - 310
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Y2 - 18 June 2017 through 22 June 2017
ER -