Fabrication and characterization of VOC sensors based on suspended zinc oxide nanorods functionalized by cobalt porphyrin

Kyounghoon Lee, Dae Hyun Baek, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We report volatile organic compound (VOC) sensors based on suspended zinc oxide nanorods (ZnONRs) functionalized by cobalt porphyrin (CoPP) as sensing material. The ZnONRs are synthesized between two facing micro-bridges to form a two-terminal device. The ZnONRs are designed to be suspended well above the substrate for better exposure to and adsorption of VOC molecules to enhance sensitivity. Both of the two bridges serve as micro-heaters to increase the temperature of ZnONRs. Few studies have investigated the use of micro-heaters to heat these suspended nanostructures for gas sensing. In order to further improve the sensitivity, ZnONRs are functionalized by coating CoPP that excellently adsorbs VOC. The fabricated sensor successfully detected 8 ppb of toluene, one of representative VOCs. Benzene and xylene of 40 ppb were also able to be measured by the fabricated sensor.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages307-310
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 2017 Jul 26
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 2017 Jun 182017 Jun 22

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

Bibliographical note

Funding Information:
This research was supported by Basic Science Research Program through the National Research Foundation of Korea(NRF) funded by the Ministry of Science, ICT and future Planning (NRF-2015R1A2A1A01005496) and the Technology Innovation Program funded By the Ministry of Trade, industry & Energy(MI, Korea) (10054548).

All Science Journal Classification (ASJC) codes

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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