Fabrication and characterization of VOC sensors based on suspended zinc oxide nanorods functionalized by cobalt porphyrin

Kyounghoon Lee; Dae Hyun Baek; Jongbaeg Kim

doi:10.1109/TRANSDUCERS.2017.7994050

Fabrication and characterization of VOC sensors based on suspended zinc oxide nanorods functionalized by cobalt porphyrin

Kyounghoon Lee, Dae Hyun Baek, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

We report volatile organic compound (VOC) sensors based on suspended zinc oxide nanorods (ZnONRs) functionalized by cobalt porphyrin (CoPP) as sensing material. The ZnONRs are synthesized between two facing micro-bridges to form a two-terminal device. The ZnONRs are designed to be suspended well above the substrate for better exposure to and adsorption of VOC molecules to enhance sensitivity. Both of the two bridges serve as micro-heaters to increase the temperature of ZnONRs. Few studies have investigated the use of micro-heaters to heat these suspended nanostructures for gas sensing. In order to further improve the sensitivity, ZnONRs are functionalized by coating CoPP that excellently adsorbs VOC. The fabricated sensor successfully detected 8 ppb of toluene, one of representative VOCs. Benzene and xylene of 40 ppb were also able to be measured by the fabricated sensor.

Original language	English
Title of host publication	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	307-310
Number of pages	4
ISBN (Electronic)	9781538627310
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994050
Publication status	Published - 2017 Jul 26
Event	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China Duration: 2017 Jun 18 → 2017 Jun 22

Publication series

Name	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Country/Territory	Taiwan, Province of China
City	Kaohsiung
Period	17/6/18 → 17/6/22

Bibliographical note

Funding Information:
This research was supported by Basic Science Research Program through the National Research Foundation of Korea(NRF) funded by the Ministry of Science, ICT and future Planning (NRF-2015R1A2A1A01005496) and the Technology Innovation Program funded By the Ministry of Trade, industry & Energy(MI, Korea) (10054548).

Publisher Copyright:
© 2017 IEEE.

All Science Journal Classification (ASJC) codes

Chemical Health and Safety
Instrumentation
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2017.7994050

Cite this

Lee, K., Baek, D. H., & Kim, J. (2017). Fabrication and characterization of VOC sensors based on suspended zinc oxide nanorods functionalized by cobalt porphyrin. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 307-310). [7994050] (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994050

Lee, Kyounghoon ; Baek, Dae Hyun ; Kim, Jongbaeg. / Fabrication and characterization of VOC sensors based on suspended zinc oxide nanorods functionalized by cobalt porphyrin. TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 307-310 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

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abstract = "We report volatile organic compound (VOC) sensors based on suspended zinc oxide nanorods (ZnONRs) functionalized by cobalt porphyrin (CoPP) as sensing material. The ZnONRs are synthesized between two facing micro-bridges to form a two-terminal device. The ZnONRs are designed to be suspended well above the substrate for better exposure to and adsorption of VOC molecules to enhance sensitivity. Both of the two bridges serve as micro-heaters to increase the temperature of ZnONRs. Few studies have investigated the use of micro-heaters to heat these suspended nanostructures for gas sensing. In order to further improve the sensitivity, ZnONRs are functionalized by coating CoPP that excellently adsorbs VOC. The fabricated sensor successfully detected 8 ppb of toluene, one of representative VOCs. Benzene and xylene of 40 ppb were also able to be measured by the fabricated sensor.",

author = "Kyounghoon Lee and Baek, {Dae Hyun} and Jongbaeg Kim",

note = "Funding Information: This research was supported by Basic Science Research Program through the National Research Foundation of Korea(NRF) funded by the Ministry of Science, ICT and future Planning (NRF-2015R1A2A1A01005496) and the Technology Innovation Program funded By the Ministry of Trade, industry & Energy(MI, Korea) (10054548). Publisher Copyright: {\textcopyright} 2017 IEEE.; 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 ; Conference date: 18-06-2017 Through 22-06-2017",

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Lee, K, Baek, DH & Kim, J 2017, Fabrication and characterization of VOC sensors based on suspended zinc oxide nanorods functionalized by cobalt porphyrin. in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems., 7994050, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Institute of Electrical and Electronics Engineers Inc., pp. 307-310, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, Taiwan, Province of China, 17/6/18. https://doi.org/10.1109/TRANSDUCERS.2017.7994050

Fabrication and characterization of VOC sensors based on suspended zinc oxide nanorods functionalized by cobalt porphyrin. / Lee, Kyounghoon; Baek, Dae Hyun; Kim, Jongbaeg.

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 307-310 7994050 (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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T1 - Fabrication and characterization of VOC sensors based on suspended zinc oxide nanorods functionalized by cobalt porphyrin

AU - Lee, Kyounghoon

AU - Baek, Dae Hyun

AU - Kim, Jongbaeg

N1 - Funding Information: This research was supported by Basic Science Research Program through the National Research Foundation of Korea(NRF) funded by the Ministry of Science, ICT and future Planning (NRF-2015R1A2A1A01005496) and the Technology Innovation Program funded By the Ministry of Trade, industry & Energy(MI, Korea) (10054548). Publisher Copyright: © 2017 IEEE.

PY - 2017/7/26

Y1 - 2017/7/26

N2 - We report volatile organic compound (VOC) sensors based on suspended zinc oxide nanorods (ZnONRs) functionalized by cobalt porphyrin (CoPP) as sensing material. The ZnONRs are synthesized between two facing micro-bridges to form a two-terminal device. The ZnONRs are designed to be suspended well above the substrate for better exposure to and adsorption of VOC molecules to enhance sensitivity. Both of the two bridges serve as micro-heaters to increase the temperature of ZnONRs. Few studies have investigated the use of micro-heaters to heat these suspended nanostructures for gas sensing. In order to further improve the sensitivity, ZnONRs are functionalized by coating CoPP that excellently adsorbs VOC. The fabricated sensor successfully detected 8 ppb of toluene, one of representative VOCs. Benzene and xylene of 40 ppb were also able to be measured by the fabricated sensor.

AB - We report volatile organic compound (VOC) sensors based on suspended zinc oxide nanorods (ZnONRs) functionalized by cobalt porphyrin (CoPP) as sensing material. The ZnONRs are synthesized between two facing micro-bridges to form a two-terminal device. The ZnONRs are designed to be suspended well above the substrate for better exposure to and adsorption of VOC molecules to enhance sensitivity. Both of the two bridges serve as micro-heaters to increase the temperature of ZnONRs. Few studies have investigated the use of micro-heaters to heat these suspended nanostructures for gas sensing. In order to further improve the sensitivity, ZnONRs are functionalized by coating CoPP that excellently adsorbs VOC. The fabricated sensor successfully detected 8 ppb of toluene, one of representative VOCs. Benzene and xylene of 40 ppb were also able to be measured by the fabricated sensor.

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M3 - Conference contribution

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T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

SP - 307

EP - 310

BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017

Y2 - 18 June 2017 through 22 June 2017

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Lee K, Baek DH, Kim J. Fabrication and characterization of VOC sensors based on suspended zinc oxide nanorods functionalized by cobalt porphyrin. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc. 2017. p. 307-310. 7994050. (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/TRANSDUCERS.2017.7994050

Fabrication and characterization of VOC sensors based on suspended zinc oxide nanorods functionalized by cobalt porphyrin

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