Fabrication and electromechanical properties of a self-actuating Pb (Zr0.52 Ti0.48) O3 microcantilever using a direct patternable sol-gel method

Ghi Yuun Kang; Sang Woo Bae; Hyung Ho Park; Tae Song Kim

doi:10.1063/1.2168261

Fabrication and electromechanical properties of a self-actuating Pb (Zr_0.52 Ti_0.48) O₃ microcantilever using a direct patternable sol-gel method

Ghi Yuun Kang, Sang Woo Bae, Hyung Ho Park, Tae Song Kim

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

20 Citations (Scopus)

Abstract

The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on Si Nx TaPtPZTPtSi O2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hzng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.

Original language	English
Article number	042904
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	88
Issue number	4
DOIs	https://doi.org/10.1063/1.2168261
Publication status	Published - 2006

Bibliographical note

Funding Information:
This research has been supported by the Intelligent Microsystem Center (IMC; http://www.microsystem.re.kr), which carries out one of the 21st century’s Frontier R&D Projects sponsored by the Korea Ministry of Commerce, Industry and Energy.

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.2168261

Cite this

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title = "Fabrication and electromechanical properties of a self-actuating Pb (Zr0.52 Ti0.48) O3 microcantilever using a direct patternable sol-gel method",

abstract = "The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on Si Nx TaPtPZTPtSi O2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hzng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.",

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AU - Bae, Sang Woo

AU - Park, Hyung Ho

AU - Kim, Tae Song

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