Fabrication and electromechanical properties of a self-actuating Pb (Zr0.52 Ti0.48) O3 microcantilever using a direct patternable sol-gel method

Ghi Yuun Kang; Sang Woo Bae; Hyung Ho Park; Tae Song Kim

doi:10.1063/1.2168261

Fabrication and electromechanical properties of a self-actuating Pb (Zr_0.52 Ti_0.48) O₃ microcantilever using a direct patternable sol-gel method

Ghi Yuun Kang, Sang Woo Bae, Hyung Ho Park, Tae Song Kim

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on Si Nx TaPtPZTPtSi O2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hzng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.

Original language	English
Article number	042904
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	88
Issue number	4
DOIs	https://doi.org/10.1063/1.2168261
Publication status	Published - 2006

Bibliographical note

Funding Information:
This research has been supported by the Intelligent Microsystem Center (IMC; http://www.microsystem.re.kr), which carries out one of the 21st century’s Frontier R&D Projects sponsored by the Korea Ministry of Commerce, Industry and Energy.

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.2168261

Cite this

@article{0c45ae8f5b6b461b831d1197a0cd2ff3,

title = "Fabrication and electromechanical properties of a self-actuating Pb (Zr0.52 Ti0.48) O3 microcantilever using a direct patternable sol-gel method",

abstract = "The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on Si Nx TaPtPZTPtSi O2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hzng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.",

author = "Kang, {Ghi Yuun} and Bae, {Sang Woo} and Park, {Hyung Ho} and Kim, {Tae Song}",

note = "Funding Information: This research has been supported by the Intelligent Microsystem Center (IMC; http://www.microsystem.re.kr), which carries out one of the 21st century{\textquoteright}s Frontier R&D Projects sponsored by the Korea Ministry of Commerce, Industry and Energy.",

year = "2006",

doi = "10.1063/1.2168261",

language = "English",

volume = "88",

pages = "1--3",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "4",

}

TY - JOUR

T1 - Fabrication and electromechanical properties of a self-actuating Pb (Zr0.52 Ti0.48) O3 microcantilever using a direct patternable sol-gel method

AU - Kang, Ghi Yuun

AU - Bae, Sang Woo

AU - Park, Hyung Ho

AU - Kim, Tae Song

N1 - Funding Information: This research has been supported by the Intelligent Microsystem Center (IMC; http://www.microsystem.re.kr), which carries out one of the 21st century’s Frontier R&D Projects sponsored by the Korea Ministry of Commerce, Industry and Energy.

PY - 2006

Y1 - 2006

N2 - The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on Si Nx TaPtPZTPtSi O2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hzng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.

AB - The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on Si Nx TaPtPZTPtSi O2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hzng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.

UR - http://www.scopus.com/inward/record.url?scp=31544449753&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=31544449753&partnerID=8YFLogxK

U2 - 10.1063/1.2168261

DO - 10.1063/1.2168261

M3 - Article

AN - SCOPUS:31544449753

VL - 88

SP - 1

EP - 3

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 4

M1 - 042904

ER -