The use of direct-patternable lead zirconate titanate (PZT) films produced using photosensitive stock solutions with ortho-nitrobenzaldehyde and UV (365 nm) irradiation has reached an advanced stage of application in microdetection systems. Electromechanical properties of direct patterned PZT microcantilevers on Si Nx TaPtPZTPtSi O2 structure were measured by a laser vibrometer system as a function of cantilever length. The gravimetric sensitivity of cantilevers in air was characterized by Au deposition, and the mass detecting resolution was 38 Hzng. These results suggested a possibility that microelectromechanical systems may be fabricated relatively easily and without high cost processes, for example, by PZT dry etching.
Bibliographical noteFunding Information:
This research has been supported by the Intelligent Microsystem Center (IMC; http://www.microsystem.re.kr), which carries out one of the 21st century’s Frontier R&D Projects sponsored by the Korea Ministry of Commerce, Industry and Energy.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)