Fabrication of a microlens array using micro-compression molding with an electroformed mold insert

Su Dong Moon, Namsuk Lee, Shinill Kang

Research output: Contribution to journalArticle

101 Citations (Scopus)

Abstract

Polymeric microlens arrays, with a diameter of 36-96 μm, a radius of curvature of 20-60 μm and a pitch of 250 μm, were fabricated using micro-compression molding with electroformed mold inserts. We used the reflow method and the electroforming process to make the mother and the metallic mold inserts, respectively. Micro-compression molding with powder polymer was developed to replicate microlenses. The surface profiles, imaging qualities, and surface roughness of the microlenses were measured and analyzed.

Original languageEnglish
Pages (from-to)98-103
Number of pages6
JournalJournal of Micromechanics and Microengineering
Volume13
Issue number1
DOIs
Publication statusPublished - 2003 Jan 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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