Abstract
Polymeric microlens arrays, with a diameter of 36-96 μm, a radius of curvature of 20-60 μm and a pitch of 250 μm, were fabricated using micro-compression molding with electroformed mold inserts. We used the reflow method and the electroforming process to make the mother and the metallic mold inserts, respectively. Micro-compression molding with powder polymer was developed to replicate microlenses. The surface profiles, imaging qualities, and surface roughness of the microlenses were measured and analyzed.
Original language | English |
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Pages (from-to) | 98-103 |
Number of pages | 6 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 13 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2003 Jan |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering