Abstract
Microfabrication processes of atomic force microscope (AFM) probe using SU-8 photoresist have been developed. Photolithographic patterning of the SU-8 on the anisotropically etched Si substrate produced the AFM cantilever with integrated tip. Use of the self-assembled monolayers and Al interlayer between the SU-8 and the Si substrate played a significant role for retrieving the probe out of the Si micromold without any damage. Fabricated SU-8 probe with a relatively sharp tip (radius of curvature ∼80nm) had a resonant frequency of 44kHz, which yields a spring constant of 0.248 N/m.
| Original language | English |
|---|---|
| Journal | Japanese Journal of Applied Physics, Part 2: Letters |
| Volume | 42 |
| Issue number | 10 A |
| Publication status | Published - 2003 Oct 1 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)
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Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist. / Lee, Jaekul; Shin, Hyunjung; Kim, Sungdong; Hong, Seungbum; Chung, Juhwan; Park, Hongsik; Moon, Jooho.
In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 42, No. 10 A, 01.10.2003.Research output: Contribution to journal › Article
TY - JOUR
T1 - Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist
AU - Lee, Jaekul
AU - Shin, Hyunjung
AU - Kim, Sungdong
AU - Hong, Seungbum
AU - Chung, Juhwan
AU - Park, Hongsik
AU - Moon, Jooho
PY - 2003/10/1
Y1 - 2003/10/1
N2 - Microfabrication processes of atomic force microscope (AFM) probe using SU-8 photoresist have been developed. Photolithographic patterning of the SU-8 on the anisotropically etched Si substrate produced the AFM cantilever with integrated tip. Use of the self-assembled monolayers and Al interlayer between the SU-8 and the Si substrate played a significant role for retrieving the probe out of the Si micromold without any damage. Fabricated SU-8 probe with a relatively sharp tip (radius of curvature ∼80nm) had a resonant frequency of 44kHz, which yields a spring constant of 0.248 N/m.
AB - Microfabrication processes of atomic force microscope (AFM) probe using SU-8 photoresist have been developed. Photolithographic patterning of the SU-8 on the anisotropically etched Si substrate produced the AFM cantilever with integrated tip. Use of the self-assembled monolayers and Al interlayer between the SU-8 and the Si substrate played a significant role for retrieving the probe out of the Si micromold without any damage. Fabricated SU-8 probe with a relatively sharp tip (radius of curvature ∼80nm) had a resonant frequency of 44kHz, which yields a spring constant of 0.248 N/m.
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M3 - Article
VL - 42
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 10 A
ER -