Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist

Jaekul Lee, Hyunjung Shin, Sungdong Kim, Seungbum Hong, Juhwan Chung, Hongsik Park, Jooho Moon

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy