Fabrication of Au thin film gratings by pulsed laser interference

Hyunkwon Shin, Hyeonggeun Yoo, Myeongkyu Lee

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

We report that one-dimensional (1D) and two-dimensional (2D) metal thin film gratings can be directly fabricated by interfering Nd-YAG pulsed laser beams (wavelength = 1064 nm, pulse width = 6 ns) incident from the backside of glass substrate. This process utilizes a laser-induced thermo-elastic force which plays a role to detach the film from the substrate. Micro-scale Au transmission gratings with a minimum feature size of 1 μm could be generated by interference-driven periodic detachment. The fabrication of tube-structured patterns as well as stripes was also possible by adjusting the pulse power and this is explained with the effect of film cohesion.

Original languageEnglish
Pages (from-to)2944-2947
Number of pages4
JournalApplied Surface Science
Volume256
Issue number9
DOIs
Publication statusPublished - 2010 Feb 15

Fingerprint

Pulsed lasers
Fabrication
Thin films
Substrates
Laser beams
Laser pulses
Metals
Glass
Wavelength
Lasers

All Science Journal Classification (ASJC) codes

  • Surfaces, Coatings and Films

Cite this

Shin, Hyunkwon ; Yoo, Hyeonggeun ; Lee, Myeongkyu. / Fabrication of Au thin film gratings by pulsed laser interference. In: Applied Surface Science. 2010 ; Vol. 256, No. 9. pp. 2944-2947.
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Fabrication of Au thin film gratings by pulsed laser interference. / Shin, Hyunkwon; Yoo, Hyeonggeun; Lee, Myeongkyu.

In: Applied Surface Science, Vol. 256, No. 9, 15.02.2010, p. 2944-2947.

Research output: Contribution to journalArticle

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