This paper firstly reports a method to fabricate C-doped tungsten oxide (WO3) nanomaterials using carbon nanotubes (CNTs) template and demonstrates its application to highly sensitive NO2 gas sensing at room temperature. The W-coating on the CNTs template is performed by a simple solution process, and the C-doped WO3 nanomaterials are synthesized through an annealing process while the CNTs are removed simultaneously. The synthesized C-doped WO3 has a shape like the CNTs, which indicates that the material has a large surface area favorable for sensitive gas detection. The fabricated sensor detected 6 ppm of NO2 at room temperature and returned perfectly to its original state. These sensing performance is comparable to the existing WO3-based NO2 sensors.
|Title of host publication||2018 IEEE Micro Electro Mechanical Systems, MEMS 2018|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||4|
|Publication status||Published - 2018 Apr 24|
|Event||31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom|
Duration: 2018 Jan 21 → 2018 Jan 25
|Name||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|Other||31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018|
|Period||18/1/21 → 18/1/25|
Bibliographical noteFunding Information:
This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT and future Planning (NRF-2015R1A2A1A01005496).
© 2018 IEEE.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering