Fabrication of C-doped WO3 nanoamterial-based gas sensors for highly sensitive NO2 detection at room temperature

Dae Hyun Baek; Soonjae Pyo; Jongbaeg Kim

doi:10.1109/MEMSYS.2018.8346710

Fabrication of C-doped WO₃ nanoamterial-based gas sensors for highly sensitive NO₂ detection at room temperature

Dae Hyun Baek, Soonjae Pyo, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper firstly reports a method to fabricate C-doped tungsten oxide (WO₃) nanomaterials using carbon nanotubes (CNTs) template and demonstrates its application to highly sensitive NO₂ gas sensing at room temperature. The W-coating on the CNTs template is performed by a simple solution process, and the C-doped WO₃ nanomaterials are synthesized through an annealing process while the CNTs are removed simultaneously. The synthesized C-doped WO₃ has a shape like the CNTs, which indicates that the material has a large surface area favorable for sensitive gas detection. The fabricated sensor detected 6 ppm of NO₂ at room temperature and returned perfectly to its original state. These sensing performance is comparable to the existing WO₃-based NO₂ sensors.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	932-935
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346710
Publication status	Published - 2018 Apr 24
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 2018 Jan 21 → 2018 Jan 25

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Other

Other	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	18/1/21 → 18/1/25

Bibliographical note

Funding Information:
This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT and future Planning (NRF-2015R1A2A1A01005496).

Publisher Copyright:
© 2018 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2018.8346710

Cite this

Baek, D. H., Pyo, S., & Kim, J. (2018). Fabrication of C-doped WO₃ nanoamterial-based gas sensors for highly sensitive NO₂ detection at room temperature. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 932-935). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346710

Baek, Dae Hyun ; Pyo, Soonjae ; Kim, Jongbaeg. / Fabrication of C-doped WO₃ nanoamterial-based gas sensors for highly sensitive NO₂ detection at room temperature. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 932-935 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{32cf99dc555945f9a5e7cd3739083517,

title = "Fabrication of C-doped WO3 nanoamterial-based gas sensors for highly sensitive NO2 detection at room temperature",

abstract = "This paper firstly reports a method to fabricate C-doped tungsten oxide (WO3) nanomaterials using carbon nanotubes (CNTs) template and demonstrates its application to highly sensitive NO2 gas sensing at room temperature. The W-coating on the CNTs template is performed by a simple solution process, and the C-doped WO3 nanomaterials are synthesized through an annealing process while the CNTs are removed simultaneously. The synthesized C-doped WO3 has a shape like the CNTs, which indicates that the material has a large surface area favorable for sensitive gas detection. The fabricated sensor detected 6 ppm of NO2 at room temperature and returned perfectly to its original state. These sensing performance is comparable to the existing WO3-based NO2 sensors.",

author = "Baek, {Dae Hyun} and Soonjae Pyo and Jongbaeg Kim",

note = "Funding Information: This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT and future Planning (NRF-2015R1A2A1A01005496). Publisher Copyright: {\textcopyright} 2018 IEEE.; 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 ; Conference date: 21-01-2018 Through 25-01-2018",

year = "2018",

month = apr,

day = "24",

doi = "10.1109/MEMSYS.2018.8346710",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "932--935",

booktitle = "2018 IEEE Micro Electro Mechanical Systems, MEMS 2018",

address = "United States",

}

Baek, DH, Pyo, S & Kim, J 2018, Fabrication of C-doped WO₃ nanoamterial-based gas sensors for highly sensitive NO₂ detection at room temperature. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 932-935, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 18/1/21. https://doi.org/10.1109/MEMSYS.2018.8346710

Fabrication of C-doped WO₃ nanoamterial-based gas sensors for highly sensitive NO₂ detection at room temperature. / Baek, Dae Hyun; Pyo, Soonjae; Kim, Jongbaeg.

2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 932-935 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Fabrication of C-doped WO3 nanoamterial-based gas sensors for highly sensitive NO2 detection at room temperature

AU - Baek, Dae Hyun

AU - Pyo, Soonjae

AU - Kim, Jongbaeg

N1 - Funding Information: This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT and future Planning (NRF-2015R1A2A1A01005496). Publisher Copyright: © 2018 IEEE.

PY - 2018/4/24

Y1 - 2018/4/24

N2 - This paper firstly reports a method to fabricate C-doped tungsten oxide (WO3) nanomaterials using carbon nanotubes (CNTs) template and demonstrates its application to highly sensitive NO2 gas sensing at room temperature. The W-coating on the CNTs template is performed by a simple solution process, and the C-doped WO3 nanomaterials are synthesized through an annealing process while the CNTs are removed simultaneously. The synthesized C-doped WO3 has a shape like the CNTs, which indicates that the material has a large surface area favorable for sensitive gas detection. The fabricated sensor detected 6 ppm of NO2 at room temperature and returned perfectly to its original state. These sensing performance is comparable to the existing WO3-based NO2 sensors.

AB - This paper firstly reports a method to fabricate C-doped tungsten oxide (WO3) nanomaterials using carbon nanotubes (CNTs) template and demonstrates its application to highly sensitive NO2 gas sensing at room temperature. The W-coating on the CNTs template is performed by a simple solution process, and the C-doped WO3 nanomaterials are synthesized through an annealing process while the CNTs are removed simultaneously. The synthesized C-doped WO3 has a shape like the CNTs, which indicates that the material has a large surface area favorable for sensitive gas detection. The fabricated sensor detected 6 ppm of NO2 at room temperature and returned perfectly to its original state. These sensing performance is comparable to the existing WO3-based NO2 sensors.

UR - http://www.scopus.com/inward/record.url?scp=85046997684&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85046997684&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2018.8346710

DO - 10.1109/MEMSYS.2018.8346710

M3 - Conference contribution

AN - SCOPUS:85046997684

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 932

EP - 935

BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018

Y2 - 21 January 2018 through 25 January 2018

ER -

Baek DH, Pyo S, Kim J. Fabrication of C-doped WO₃ nanoamterial-based gas sensors for highly sensitive NO₂ detection at room temperature. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 932-935. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346710