Fabrication of C-doped WO3 nanoamterial-based gas sensors for highly sensitive NO2 detection at room temperature

Dae Hyun Baek, Soonjae Pyo, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper firstly reports a method to fabricate C-doped tungsten oxide (WO3) nanomaterials using carbon nanotubes (CNTs) template and demonstrates its application to highly sensitive NO2 gas sensing at room temperature. The W-coating on the CNTs template is performed by a simple solution process, and the C-doped WO3 nanomaterials are synthesized through an annealing process while the CNTs are removed simultaneously. The synthesized C-doped WO3 has a shape like the CNTs, which indicates that the material has a large surface area favorable for sensitive gas detection. The fabricated sensor detected 6 ppm of NO2 at room temperature and returned perfectly to its original state. These sensing performance is comparable to the existing WO3-based NO2 sensors.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages932-935
Number of pages4
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 2018 Apr 24
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 2018 Jan 212018 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Baek, D. H., Pyo, S., & Kim, J. (2018). Fabrication of C-doped WO3 nanoamterial-based gas sensors for highly sensitive NO2 detection at room temperature. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 932-935). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346710