Fabrication of complex multilevel microchannels in PDMS by using three-dimensional photoresist masters

Kwang Seok Yun, Euisik Yoon

Research output: Contribution to journalArticle

25 Citations (Scopus)


This paper demonstrates a new method of implementing complex microchannels in PDMS, which is simply constructed using three-dimensional photoresist structures as a master mold for the PDMS replica process. The process utilizes UV-insensitive LOR resist as a sacrificial layer to levitate the structural photoresist. In addition, the thickness of photoresist structures can be controlled by multi-step UV exposure. By using these techniques, various three-dimensional photoresist structures were successfully implemented, including the recessed cantilevers, suspended bridges, and the complex plates with micro-pits or micro-villi. We demonstrate that the three-dimensional photoresist structures are applicable to implementing complex multiple microchannels in PDMS by using the PDMS replica method.

Original languageEnglish
Pages (from-to)245-250
Number of pages6
JournalLab on a chip
Issue number2
Publication statusPublished - 2008 Jan 1


All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Biochemistry
  • Chemistry(all)
  • Biomedical Engineering

Cite this