Abstract
This paper demonstrates a new method of implementing complex microchannels in PDMS, which is simply constructed using three-dimensional photoresist structures as a master mold for the PDMS replica process. The process utilizes UV-insensitive LOR resist as a sacrificial layer to levitate the structural photoresist. In addition, the thickness of photoresist structures can be controlled by multi-step UV exposure. By using these techniques, various three-dimensional photoresist structures were successfully implemented, including the recessed cantilevers, suspended bridges, and the complex plates with micro-pits or micro-villi. We demonstrate that the three-dimensional photoresist structures are applicable to implementing complex multiple microchannels in PDMS by using the PDMS replica method.
Original language | English |
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Pages (from-to) | 245-250 |
Number of pages | 6 |
Journal | Lab on a chip |
Volume | 8 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2008 |
All Science Journal Classification (ASJC) codes
- Bioengineering
- Biochemistry
- Chemistry(all)
- Biomedical Engineering